4
tina80e1 (2012-06)
Intended
Use
The Capacitance Diaphragm Gauges of the CDG020D series
are intended for absolute pressure measurement of gases in
their respective pressure ranges (
→
3).
The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller (VGC series) or another appropriate
measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro-
nics which convert the capacitance into a DC voltage output sig-
nal.
The output signal is linear to the measured pressure and inde-
pendent of the gas type.
Trademarks
Porter™ INFICON
GmbH
VCR
®
Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2,
7536915 B2