10
tina80e1 (2012-06)
Materials exposed to vacuum
Flange, tube
Sensor, feedthrough
stainless steel AISI 316L
ceramics (Al
2
O
3
≥
99.5%)
Internal volume
DN 16 ISO-KF
4 VCR male
4 VCR female
8 VCR female
≤
3.7 cm
3
≤
6.1 cm
3
≤
5.6 cm
3
≤
5.1 cm
3
Admissible pressure (absolute)
≥
500 Torr/mbar (F.S.)
50 … 200 Torr/mbar (F.S.)
10 … 30 Torr/mbar (F.S.)
4 bar
3 bar
2 bar
Bursting pressure (absolute)
6 bar
Temperature compensated range +10 °C … +50 °C
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
–20 °C … +85 °C
0 °C … +70 °C
≤
110 °C at the flange
Relative humidity
≤
80% at temperatures
≤
+31 °C decreasing to 50%
at +40°C
Use
indoors only, altitude up to
4000 m NN
Degree of protection
IP 40
