8
8.
Precaution for Handling
1)
Use the clean piping and make sure that it has no leak.
2)
Supply the clean gas to the MFC, free from dust, mist, etc.
Dust and mist could cause a control failure due to deteriorated accuracy or clogging.
Use a filter of 0.1
μ
m or less.
3)
When attaching or removing the joint, fix the main body with a spanner, vice etc.
4)
The internal valve of the MFC cannot provide complete shut off.
When complete shut off is required, install a shut off valve separately.
5)
When the control valve in the MFC is fully open or when it’s out of control, the flow rate
of gas exceeds the indicated F.S. value.
6)
A storage temperature range is 0 to 50
℃
. Do not store beyond these limits.
7)
Do not disconnect/ reconnect a cable with the power turned on. It could cause a trouble.
8)
Do not apply an excessive force to the main body or cable.
9)
Do not apply an excessive pressure to the main body.
10)
The withstand voltage for the set input is
±
15V. Never apply a voltage beyond these
limits.
11)
Never remove the MFC case especially while power is supplied.
12) The flow rate output of the SEC may be transitionally made within a range of the supply
voltage. Note the withstand voltage of the input device.
13) Do not turn on and off the power repeatedly in a short period. More than three seconds
should be kept before turning on the power again. Each 15v power source should be
turned on/off simultaneously. Partial power supply or signal input and
plugging/unplugging while power is supplied may cause trouble.
14) HORIBA STEC converts a flow rate value into 25
℃
,1013hPa(1atm) or
0
℃
,1013hPa(1atm) to calibrate.
Gas flow rate in the following states:
CCM, LM : 25
℃
, 1013hPa(1atm)
SCCM, SLM : 0
℃
, 1013hPa(1atm)
15) When you want to use non-calibration gas, consult us.
