2
1. Introduction
Thank you for purchasing our mass flow controller SEC(SEF) -E400X series. Prior to using it,
please read this manual thoroughly to use it properly for a long period of time.
2.
Specifications
2-1 Mass flow controller (SEC-E431X/SEC-E441X)
Type *1
SEC-E431X
SEC-E441X
Standard flow rate range *2
(Full scale flow rate equivalent to N
2
)
50 / 100 SLM
200 SLM
Valve structure
Closed when power is not supplied
Control range
5
〜
100% F.S.
Accuracy *3,*4
±
1.0% F.S.
Operating temperature
5
〜
45
℃
Responsibility (T98) *5
Within 1second (typical)
Linearity *3
Within
±
0.5% of F.S.
Repeatability *3
Within
±
0.5% of F.S.
Operating differential pressure *6,*7
100
〜
300 kPa (D)
200
〜
350 kPa (D)
Maximum operating pressure *6
350 kPa (G)
Pressure resistance *6
1000 kPa (G)
Leak integrity *8
1
×
10
-9
Pa
･
m
3
/sec (He) or less
Setting signal
0.25
〜
5V DC (Input impedance
1 M
Ω
or more)
Output signal
0
〜
5V DC (Minimum load resistance 2k
Ω
)
Power source
+15V DC
±
5% 50mA , –15V DC
±
5% 200mA
Wetted material
Stainless steel, Magnetic stainless steel,
Fluoro rubber, PTFE
Standard fittings
3/8inch Swagelok or equivalent
*1:This product is in conformity with RoHS directives.
*2:SLM denotes gas flow rate in l/min.
*3:Accuracy, linearity and repeatability are guaranteed for the calibration gas.
*4:Temperature for accuracy guarantee is in accordance with SEMI standard E56
−
1296.
*5:A time required to stay within the full scale
±
2% from the minimum controllable flow rate.
*6:(D) indicates differential pressure. (G) indicates gauge pressure.
*7:The operation differential pressure may differ depending on the specifications.
*8:
Mechanical l
eak rate (SEMI standard E16
−
90).
