Satellite XT R Version
Reference Information - Section 8
8-1
8.1
Sensor Order Information
Substance / Sensor
Part No.
sensor
Nominal
Range
Unit
Note
Dust Filter
allowed
AsH3
Arsine (3 El.)
9602-6001
0 ... 1.00
ppm
yes
AsH3
Arsine (2 El.)
9602-6004
0 ... 1.00
ppm
1)
yes
AsH3
Arsine (2 El.)
9602-6002
0 ... 10.0
ppm
1)
yes
B2H6
Diborane
9602-6202
0 ... 1.00
ppm
yes
Br2
Bromine
9602-6800
0 ... 5.00
ppm
No
C4F6
Hexafluorobutadiene
9602-9732
0 ... 50.0
ppm
3)
no data
C5F8
Octafluorocyclopentene
9602-9730
0 ... 20.0
ppm
3)
no data
CH3F
Methyl Fluoride
9602-9720
0 ... 0.500
% vol.
3)
no data
Cl2
Chlorine
9602-5300
0 ... 5.00
ppm
yes
ClF3
Chlorine Trifluoride
9602-7410
0 ... 1.00
ppm
No
ClO2
Chlorine Dioxide
9602-7400
0 ... 1.00
ppm
No
CO
Carbon Monoxide
9602-5400
0 ... 500
ppm
yes
COCl2
Phosgene
9602-6600
0 ... 1.00
ppm
yes
DCE 1,2 Di-chloro-ethylene 1,2
9602-9600
0 ... 1000
ppm
3)
no data
C2H4O
Ethylene Oxide
9602-8000
0 ... 20.0
ppm
no data
F2
Fluorine
9602-6400
0 ... 5.00
ppm
No
F2
Fluorine
9602-6401
0 ... 30
ppm
No
GeH4
Germane
9602-6902
0 ... 5.0
ppm
yes
H2
Hydrogen (1%)
9602-5100
0 ... 1.000
% vol.
yes
H2
Hydrogen (4 %)
9602-5101
0 ... 4.00
% vol.
2)
yes
H2S
Hydrogen Sulfide
9602-5200
0 ... 100
ppm
yes
H2S
Hydrogen Sulfide (org.)
9602-5201
0 ... 30.0
ppm
1)
yes
H2Se
Hydrogen Selenide
9602-5601
0 ... 5.00
ppm
No
HBr
Hydrogen Bromide
9602-7000
0 ... 30.0
ppm
No
HCl
Hydrogen Chloride
9602-5800
0 ... 30.0
ppm
No
HCN
Hydrogen Cyanide
9602-5700
0 ... 30.0
ppm
No
HF
Hydrogen Fluoride
9602-6500
0 ... 10.0
ppm
No
HMDS
Hexamethyldisilazane
9602-6714
0 ... 500
ppm
yes
HMDS
Hexamethyldisilazane
9602-6715
0 ... 0.500
% vol.
yes
N2H4
Hydrazine
9602-7600
0 ... 1.00
ppm
yes
NF3
Nitrogen Trifluoride
9602-9700
0 ... 50.0
ppm
3)
no data
NH3
Ammonia (100 ppm)
9602-6704
0 ... 100
ppm
No
NH3
Ammonia (1000 ppm)
9602-6705
0 ... 1000
ppm
2)
No
NO
Nitric Oxide
9602-7200
0 ... 250
ppm
yes
NO2
Nitrogen Dioxide
9602-7300
0 ... 25.0
ppm
yes
O2
Oxygen
9602-5500
0 ... 25.0
% vol.
yes
O3
Ozone
9602-7100
0 ... 1.00
ppm
No
O3
Ozone
9602-7101
0 ... 1.00
ppm
1)
No
continued overleaf