Halma ALICAT SCIENTIFIC M Series, Operating Manual

Page: 4 / 47

Table of Contents
January 2023 • Rev. 0 • Standard Devices User Manual
4
Modbus RTU Communication
33
Establishing Communication
33
Multidrop Information
33
Modbus RTU Serial Protocol
33
Process Data
33
Writing Control and Configuration Information
34
Status Flags
34
Modbus Reading and Status Registers
34
Special Commands
34
Custom Gas Mixtures
34
Special Commands and Arguments
35
Special Command Result Status Codes
35
Troubleshooting
36
Mass Flow Devices
37
Maintenance
38
Cleaning
38
Repair
38
Recalibration
38
Appendix A: Pinouts
39
8-Pin Mini-DIN (Default)
39
Locking Industrial Connector Pinout
39
9-Pin D-Sub Connector Common Pinouts
40
15-Pin D-Sub Connector Common Pinouts
40
M12 Connector Common Pinouts
41
Appendix B: Reference Information
42
Engineering Units
42
Gas List by Number
43
Gas List by Category
44
Appendix C: Application Setup
45
MCV Controller Operating Notes
45
Pressure Controller Applications
45
Forward (Downstream) Pressure Control
45
Back Pressure Control
46
Dual Valve Pressure Control
46
Differential Pressure Control
46
Remote-Sensing Controller
47
Integrated Vacuum Controllers (IVC)
47