24
EQ-400 Operation Manual Rev.
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Bit #
Definition
0 (LSB)
Fault status: 1 = one or more faults present, 0 = no faults
1
Laser status: 1 = on, 0 = off
2
Lamp status: 1 = on, 0 = off
3
Laser temperature: 1 = overtemperature, 0 = OK
4
Laser power supply voltage: 1 = out of range, 0 = OK
5
Laser current source: 1 = fault, 0 = OK
6
Lamphead temperature: 1 = overtemperature, 0 = OK
7
PCU temperature: 1 = overtemperature, 0 = OK
8
Lamphead interlock: 1 = open, 0 = OK
9
External interlock: 1 = open, 0 = OK
10
PCU cover interlock: 1 = open, 0 = OK
11
Laser photodiode signal: 1 = low, 0 = OK
12
Lamp photodiode signal: 1 = low, 0 = OK
13
Ignition status: 1 = failed to ignite, 0 = OK
14
System control mode: 1 = remote, 0 = local
15
Reserved
– always 0
Table 6:
System Status Word
Summary of Contents for LDLS EQ-400
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