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EQ-400 Operation Manual Rev.
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External features (refer to Figure 4):
Output Windows
The lamp windows at the optical output provide protection from the high pressure bulb inside
the Lamp House. An internally-threaded SM30 adapter is provided for easy connection of
optical hardware. An optional retroreflector can be installed on the output window on one
side of the Lamp House if only one optical output is required.
In addition to the light output, invisible laser radiation exceeding Class 1 emission limits is
emitted from the output apertures.
Nitrogen Purge Inlet / Outlet
These are the fittings for the required nitrogen purge gas. With no purge, ozone will form
from atmospheric oxygen and attenuate the light output in the 220 – 280nm band. In
addition, atmospheric oxygen and water vapor will attenuate the output below 200nm.
Cooling Water Inlet / Outlet
These fittings are for connection of cooling water required by the Lamp House.
Laser On Indicator
This LED is illuminated when the laser is ON.
Control Connector (9-pin D-sub)
Provides various power and control signals to/from the Power Supply Controller. No other
connector or cable may be used with the EQ-400 other than the one supplied.
Summary of Contents for LDLS EQ-400
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