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Energetiq LDLS EQ-400, Operation Manual

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Copyright © 2018 Energetiq Technology Inc. All rights reserved. 

Energetiq  products  are  covered  by  the  following  patents:  US  7435982,  7786455,  8525138, 

8969841,  9048000,  9185786;  Japan  5410958,  5628253;  Korea  10-1507617;  UK  GB2450045. 
All technical information, including drawings, schematics and specifications contained in this 

manual are the property of Energetiq and shall not be reproduced in whole or in part without 
the  written  consent  of  Energetiq.  The  content  of  this  manual  is  subject  to  change  without 

notice. 

Energetiq Technology Inc. 

7 Constitution Way, Woburn, MA 01801 USA 
Tel. +1 (781) 939-0763 

Fax +1 (781) 939-0769 
E-mail: 

[email protected]

 

http://www.energetiq.com

 

 

 

Summary of Contents for LDLS EQ-400

Page 1: ...Model EQ 400 LDLS Laser Driven Light Source Operation Manual Revision 7 April 2018 Part Number DOC 7388...

Page 2: ...nical information including drawings schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of...

Page 3: ...EU Declaration of Conformity...

Page 4: ......

Page 5: ...ifications 10 System Description 12 Power Control Unit PCU 13 Lamp House 14 Chapter 3 17 Installation 17 Unpacking 17 Installation Procedure 17 Chapter 4 21 Operation 21 Starting 21 Stopping 21 Manual...

Page 6: ......

Page 7: ...ace prior to energizing the unit All interlocks must be satisfied prior to operation failure to do so may lead to hazardous conditions The EQ 400 emits dangerous levels of UV radiation Even short expo...

Page 8: ...pt to open the Power Control Unit or Lamp House enclosure of the EQ 400 No regular maintenance is required for the EQ 400 Any service to the system must be performed only by factory authorized and tra...

Page 9: ...lasma that radiates in the UV as well as the visible bands A Class 4 laser is located in the Power Control Unit enclosure The optical configuration of the Lamp House ensures that the direct laser beam...

Page 10: ...following safety labels appear on the product Figure 1 shows the location of each label on the EQ 400 system UV Hazard warning label indicates hazardous levels of UV light are present Manufacturer s...

Page 11: ...or Reference source not found 5 Hazard warning label indicates that a laser hazard is present Protective housing label warns of an enclosed laser radiation hazard Protective housing label warns of an...

Page 12: ...6 EQ 400 Operation Manual Rev Error Reference source not found Aperture Label Manufacturer s Identification label UV Hazard Warning Label Hazard Warning Label Protective Housing Label...

Page 13: ...ith interlocks to prevent operation of the device when any of the following conditions are present 1 A remote interlock is open 2 Lamp House cover not installed 3 Laser fiber not connected to Lamp Hou...

Page 14: ...Any suitable normally open contact or solid state switch can operate the interlock circuit The contact or switch should be rated for 8mA minimum at 5VDC The interlock circuit must be connected to enab...

Page 15: ...nclude Very high brightness across complete spectrum 190nm through visible and beyond Eliminates need for multiple lamps replaces D2 Tungsten Xenon Arc Simplified optical system Excellent spatial stab...

Page 16: ...nit 133 x 483 x 584 mm 5 2 x 19 0 x 23 0 in Weight Lamp House 2 7 kg 6 0 lb Power Control Unit 18 8 kg 41 5 lb Utility Requirements Electrical 200 240 V 50 60 Hz 7A 1700 W max Purge gas clean dry nitr...

Page 17: ...85 4 wire full duplex Connector Male 9 pin d sub Termination 120 ohms across receiver input pins 2 and 7 Interface protocol see Chapter 4 Port settings 9600 bps 8 data bits 1 stop bit no parity no han...

Page 18: ...fiber permanently attached to the PCU The following sections provide descriptions of the system components and controls and give an overview of their functions Refer to the Installation section of th...

Page 19: ...is ON and laser light is being produced within the Lamp House REMOTE System is in remote control mode LASER OVERTEMP Laser internal temperature too high LASER FAULT Laser module internal fault PCU FAU...

Page 20: ...l Connector 9 pin D sub Provides various power and control signals to from the Lamp House module No other connector or cable may be used with the EQ 400 other than the one supplied RS 485 Connector 9...

Page 21: ...ouse Assembly Output Window also on opposite side Laser radiation in excess of Class 1 exposure limits is emitted from these apertures Control Connector to PCU Nitrogen Purge Inlet Laser ON Indicator...

Page 22: ...eding Class 1 emission limits is emitted from the output apertures Nitrogen Purge Inlet Outlet These are the fittings for the required nitrogen purge gas With no purge ozone will form from atmospheric...

Page 23: ...amp House due to the length of the interconnecting cable See drawing OTD 8198 in Appendix A for dimensional details Note The PCU weighs 18 8 kg 41 5 lb A two person lift is recommended Use care when m...

Page 24: ...Power Control Unit to the Lamp House 5 Connect nitrogen purge gas to the 4mm push to connect fittings on the Lamp House 6 Connect cooling water to the 8mm Swagelok fittings on the Lamp House 7 Connect...

Page 25: ...n when ON LASER ON 2 Pulled to digital common when ON LAMP MODULE FAULT 3 Pulled to digital common when OK float on FAULT CONTROLLER FAULT 4 Pulled to digital common when OK float on FAULT ISOLATED 5V...

Page 26: ...20 EQ 400 Operation Manual Rev Error Reference source not found Figure 5 Remote Interface Schematic...

Page 27: ...LED will light Laser light is now present in the Lamp House 5 Within several seconds the igniter will be turned on automatically and the plasma will ignite The LAMP ON LED will light To avoid thermal...

Page 28: ...to clear the fault The lamp can then be started normally by turning the switch to OPERATE Serial Interface The RS 485 serial interface is provided for user adjustment of laser operating power in order...

Page 29: ...Query bulb operating time Bulb time XXXX secs Z Zero bulb operating time Send z within 10 sec to confirm z Confirm zeroing of bulb time Bulb hours zeroed flash saved L Query laser operating time Lase...

Page 30: ...ltage 1 out of range 0 OK 5 Laser current source 1 fault 0 OK 6 Lamphead temperature 1 overtemperature 0 OK 7 PCU temperature 1 overtemperature 0 OK 8 Lamphead interlock 1 open 0 OK 9 External interlo...

Page 31: ...erence source not found 25 A p p e n d i x A ENGINEERING DRAWINGS The following engineering drawings are included for reference Drawing number Revision Title OTD 8159 1 EQ 400 Lamp Housing Outline OTD...

Page 32: ...26 EQ 400 Operation Manual Rev Error Reference source not found...

Page 33: ...version 23 January 2017 1 Initial release 08 February 2017 2 Added protective housing label and additional safety information 10 February 2017 3 Updated labeling information 7 September 2017 4 Miscell...

Page 34: ...28 EQ 400 Operation Manual Rev Error Reference source not found...

Page 35: ......

Page 36: ...nical information including drawings schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of...

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