Series
IZS31
Technical
0.7
0.6
0.5
0.4
0.3
0.2
0.1
300 380 620
0 50 100 150 200
Flow rate (
l
/min)(ANR)
S
u
p
p
ly
p
re
ss
u
re
(
M
P
a
)
S
e
n
so
r
o
u
tp
u
t
v
o
lt
ag
e
(
V
)
Static electricity Removal Characteristics
Note)
4) Flow rate — pressure characteristics
0
How to measure
Measurement of air supply
Measurement of pressure
TU0425: Length 10 mm
KQ2T04-00
(a) Single side air supply
(IZS31-300, 380, 620, 780)
Sensor Monitor Output (When feedback
Relationship in installation distance
electrostatic potential and sensor
6
5
4
3
Installation distance 25 mm
2
Installation
1
0
–2000 –1500 –1000 –500 0 500
Electrostatic potential (V)
Technical Data 3
620 780
200 250 300
In
st
al
la
ti
o
n
d
is
ta
n
ce
Note) Static electricity elimination features are based on data from using a charged plate (size: 150 mm x 150 mm, capacitance:
(ANSI/ESD, STM3, 1-2000). Use this as a guideline for model selection only because the value varies depending on the
TU0425: Length 10 mm
KQ2T04-00 KQ2T04
(b) Both sides air supply
(IZS31-1100, 1260, 1500, 1900, 2300)
feedback sensor is used)
Note) The installation distance in the figure
undergoing static electricity removal
distance between
sensor output voltage
Feedback sensor detection
The relationship between the
electrostatic sensor and the detection
Sensor head
Installation distance 50 mm
Detection
hole
distance 10 mm
Detection range
500 1000 1500 2000
(V)
Detection hole
Installation
distance (mm)
Detection range
(mm)
10
45
25
100
50
180
In
st
al
la
ti
o
n
d
is
ta
n
ce
capacitance: 20 pF) as defined in the U.S. ANSI standards
the material and/or size of the subject.
KQ2T04-00
figure refers to the distance from the object
removal to the electrostatic sensor.
detection range
installation distance of the
detection range is as follows:
Sensor head
