Edwards iXL120, Instruction Manual

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Contents
A541-11-880 Issue A
Tables
Table Page
1 General technical data .................................................................................................. 5
2 General technical data .................................................................................................. 5
3 Levelling foot loads (refer to Figure 4 ) ............................................................................... 6
4 General electrical data ................................................................................................. 7
5 Electrical ratings: ultimate vacuum and extracted (700 torr) exhaust load condition ....................... 7
6 Electrical ratings: full load conditions ............................................................................... 8
7 Electrical ratings: over-load condition (175% full load for 60s) .................................................. 8
8 Branch circuit protection / fusing ..................................................................................... 9
9 Electrical connections ................................................................................................... 9
10 Input supply wire assembly ...........................................................................................10
11 Water cooling system data ............................................................................................11
12 Nitrogen supply .........................................................................................................11
13 Tool connectors and mating tool connector kits ...................................................................23
14 Tool input signals to the pump system ..............................................................................23
15 Pump protection sensors ..............................................................................................27
16 Disconnect box ..........................................................................................................35
17 EMS button ...............................................................................................................36
18 Accessories modules ....................................................................................................36
19 PDT ........................................................................................................................36
20 PDT adaptor cable ......................................................................................................36
21 PDT holster ..............................................................................................................36
22 PDT extension cable ....................................................................................................37
23 Lifting / seismic / stacking brackets ................................................................................37
24 Water flow control valve ..............................................................................................37
25 Stainless steel water fittings ..........................................................................................37
26 Main power connector .................................................................................................37
27 EMS terminator plug ....................................................................................................38
28 Interface modules ......................................................................................................38
A1 Pump start / stop and control ........................................................................................42
A2 Pump start / stop and control ........................................................................................42
A3 Normal menu ............................................................................................................43
A4 Status menu .............................................................................................................43
A5 Setup menu ..............................................................................................................44
A6 Commands menu ........................................................................................................44
A7 Display inverter fault history menu ..................................................................................44
A8 Fit accessory menu .....................................................................................................45
A9 IP configuration menu ..................................................................................................45
A10 Display menu ............................................................................................................46
A11 Display menu select line ...............................................................................................46
A12 Display menu units ......................................................................................................46
A13 Warnings .................................................................................................................47
A14 Alarms ....................................................................................................................49
A15 Hexadecimal to digital conversion ...................................................................................50
A16 Inverter alarm codes ...................................................................................................50
A17 Inverter warnings codes ...............................................................................................51