16.
Target Life Mode
1 to 15000 kWh
Monitoring if the output energy
reaches the setting of kWh.
3.7. Mechanical Specification
The outward appearance, cooling specification for minimum CFM Requirement, and I/O ports
of Delta “HPP-1K5A01KAT” sputtering power supply are described as below:
Table 3.4 Mechanical Specification
Item
Description
Physical Dimension
482.6(W)x132.5(H)x560(L)mm
19"(W)x5.2"(H)x23.6"(L)
(19" 3U)
Weight
32kg
Cooling
Fan Cooling
AC Input Connector
Harting Han Q/5 series p/n 09120052633
DC Output Connector
7/16 Connector, Female
User Port
Analog I/O: 15-pin female D-sub
Host Port
Digital I/O: 9-pin female RS232 and RS485 and RJ45
Mechanical Drawing
Unit: mm (inch)
Figure 3.6 Mechanical Drawing of Delta “HPP-1K5A01KAT” sputtering power supply
