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Delta HPP-1K5A01KAT, User Manual

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Delta HPP-1K5A01KAT User Manual Download Page 5

2. 

 

 

Heavy object: 

Two persons lifting are recommended to avoid muscle strain or 
back injuries.

 

 

1.3. 

Electromagnetic Compatibility Directives and Standard 

 

Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20kVA) 

 

General Immunity Standard for Industry: EN 61000-6-2 

 

Safety Requirement: IEC-61010-1 (CE and UL certification) 

1.4. 

Industry Guideline 

 

Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47 

 

 

Summary of Contents for HPP-1K5A01KAT

Page 1: ...User Manual PULSED DC Power Supply Continuous 325 1000VDC Model HPP 1K5A01KAT A Version Rev S 00...

Page 2: ...lled of cost 1 To exceed the warranty period 2 Subject to misuse negligence accident or natural disaster 3 Used in a hazardous or dangerous manner either alone or in conjunction with other equipment 4...

Page 3: ...on Profile 15 3 6 Process and Monitor Function 15 3 6 Mechanical Specification 16 3 6 Environment Specification 18 Chapter 4 System Protection Mechanism 19 4 1 Input Breaker 19 4 2 Protection by MCU 1...

Page 4: ...devices connected to the generator or lose important data This caution symbol advises that improper operation will cause personal injury or damage the power supply or any electronic devices connected...

Page 5: ...netic Compatibility Directives and Standard Disturbance Characteristic EN55011 CRSP11 Class A Group 1 20kVA General Immunity Standard for Industry EN 61000 6 2 Safety Requirement IEC 61010 1 CE and UL...

Page 6: ...rget Asymmetric pulsing output makes the arc happening reduced dramatically With High speed MCU based arc detection Delta power could achieve 1 micro sec arc detection time As soon as the arc is detec...

Page 7: ...er PFC soft start mechanism suppresses inrush current to prevent any damage A good power factor condition back to the mains then is modified through Taipei rectifier PFC and AC voltage is rectified to...

Page 8: ...level feedback values set up Arc processing process control interface setup communication set and system status during power supply working Remote Control Interface The power supply supports three typ...

Page 9: ...25 C At DC Mode Output Current Accuracy 1 of command setting or 0 25 of full scale current between output and command Within operation range at 25 C At DC Mode D sub Monitor Command Analog Interface...

Page 10: ...350 9 2 s 355 9 1 s 360 9 s 365 8 9 s 370 8 7 s 375 8 6 s 380 8 5 s 385 8 4 s 390 8 3 s 395 8 2 s 400 8 1 s 405 8 s 410 7 9 s 415 7 8 s 420 7 7 s 425 7 6 s 430 7 5 s 435 7 4 s 440 7 3 s 445 7 3 s 450...

Page 11: ...s 590 5 5 s 595 5 4 s 600 5 4 s 605 5 3 s 610 5 3 s 615 5 2 s 620 5 2 s 625 5 2 s 630 5 1 s 635 5 1 s 640 5 s 645 5 s 650 5 s 655 4 9 s 660 4 9 s 665 4 8 s 670 4 8 s 675 4 8 s 680 4 7 s 685 4 7 s 690...

Page 12: ...4 0 s 815 3 9 s 820 3 9 s 825 3 9 s 830 3 9 s 835 3 8 s 840 3 8 s 845 3 8 s 850 3 8 s 855 3 7 s 860 3 7 s 865 3 7 s 870 3 7 s 875 3 7 s 880 3 6 s 885 3 6 s 890 3 6 s 895 3 6 s 900 3 6 s 905 3 5 s 910...

Page 13: ...uency kHz Pulse Reversal Time Maximum s Duty Cycle min Reverse Period Duty Cycle max Reverse Period 5 5 10 0 2 5 10 10 10 0 4 10 15 15 004 10 0 6 15 20 20 10 0 8 20 25 25 10 1 25 30 29 985 10 1 2 30 3...

Page 14: ...6 4 44 8 165 165 289 2 7 6 61 44 6 170 169 492 2 6 6 78 44 1 175 175 439 2 5 7 02 43 9 180 180 18 2 4 7 21 43 2 185 183 486 2 4 7 41 44 190 190 476 2 3 7 62 43 8 195 194 175 2 3 7 77 44 7 200 200 2 2...

Page 15: ...1 2 12 9 38 7 330 327 869 1 2 13 11 39 3 335 333 333 1 2 13 33 40 340 338 983 1 1 13 56 37 3 345 344 828 1 1 13 79 37 9 350 350 877 1 1 14 04 38 6 355 355 877 1 14 2 35 5 360 360 878 1 14 4 36 365 365...

Page 16: ...Limit Figure 3 3 Curve of Output Impedance Characteristic For Delta HPP 1K5A01KAT power supply the maximum output voltage and current level are 1000 V and 4 62 A Measured at the DC output The output...

Page 17: ...ted Number of detected arcs is displayed by the front panel display or from communication interface If hard arc inside vacuum chamber occur the hard arc flag will be raised and the power will shut dow...

Page 18: ...rocess and Monitor Function Table 3 4 Adjustable function parameters for User Item Specification Description Max Power 20 to 1 5 kW Power will be constrained within the value of setting prior to the s...

Page 19: ...below Table 3 4 Mechanical Specification Item Description Physical Dimension 482 6 W x132 5 H x560 L mm 19 W x5 2 H x23 6 L 19 3U Weight 32kg Cooling Fan Cooling AC Input Connector Harting Han Q 5 se...

Page 20: ...h space for air flow cooling capability when it is installing to the cabinet Air inlet on the front panel and air outlet on the rear panel is shown in figure 3 7 Air outlet of rear panel is responsibl...

Page 21: ...ing 80kPa to 106kPa approximately 2000m above sea level Storage 25 C to 55 C 13 F to 131 F 10 to 95 RH 80kPa to 106kPa approximately 2000m above sea level Transportation 25 C to 70 C 13 F to 158 F 95...

Page 22: ...ower A Target Life Monitor 09 Power off while output reaches setting Energy L Output Interlock 11 Uninstallation of output cover L Contactor Interlock 12 Uninstallation of contactor pin in D sub conne...

Page 23: ...tion should be only in pollution degree 2 or better environment Do not operate this device in a dusty area or in corrosive gas environment Proper grounding For safe use must connect ground cable Yello...

Page 24: ...ted so that the hot air is removed from the cabinet as quickly as possible Each HPP 1K5A01KAT A power supply dissipates up to 10 of its maximum power at full rated output The minimum air flows in cubi...

Page 25: ...g For your convenience the rear panel of the HPP 1K5A01KAT supply features three equipotential ground screw three M6 screw These are indicated on the rear panel by a ground symbol See figure 6 2 for m...

Page 26: ...de user could adjust output current regulation level by enter button and knob V Button Press the button to set the output condition in constant voltage mode In constant voltage mode user could adjust...

Page 27: ...ature ARC After the output has been turned off this LED lights green for a predetermined time if the hard arc count limit was reached during the previous run You define this limit The ARC LED will be...

Page 28: ...nnector for interfacing with a host computer 4 Your pulsed DC power supply features a user port with a 15 pin female D sub connector for interfacing with a computer 5 The Contactor Intlk port located...

Page 29: ...h Function Screen Host R S232 Master Slave Operation Data Integral Power Run Integral Time Run Power On Count Output Power Count After Initializing System Power On Count After Initializing System Outp...

Page 30: ...M L T 0 0 0 0 0 S E 0 0 s R Command Power On Off Voltage Current Power Reader Arc Number Arc Density Set Point Energy Target Life Mode Run Time Hr Min Sec Master Slave 0 0 1 u T Lock 0 0 0 z H k D 9...

Page 31: ...pply lets user connect with computer to control the power supply Definition of RS232 connector is as follows Figure 6 3 Host Port 9 pin female RS232 RS485 connector Table6 2 Definition of RS232 RS485...

Page 32: ...amp Time IP 0x25 0x00 01 0x00 0x00 Value 0x00 Value 0x00 0x0D Target Life IP 0x26 0x00 01 02 0x00 0x00 Value 0x00 Value 0x00 0x0D Pulse reverse time IP 0x29 0x00 01 0x00 0x00 Value 0x00 Value 0x00 0x0...

Page 33: ...Value 0x00 Value 0x00 0x0D Ramp Time IP 0x25 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D Target Life IP 0x26 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D Pulse reverse time IP 0x29 0x0A 0x00 0x00 Value 0x0...

Page 34: ...00 for 0 to 1000V CC Mode 0 to 462 for 0 4 62A CP Mode 20 to 1500 for 10w to 1500W A Ri Offset Plus 00 Minus 01 0 to 99 for 0 to 9 9 A Vo Offset Plus 00 Minus 01 0 to 99 for 0 to 9 9 A Io Offset Plus...

Page 35: ...ctor of photo coupler 2 VOUT_A O Pin 2 shows the reader of output voltage 0 to 10 V for V 0 to 1000 V 3 POUT_A O Pin 3 shows the reader of output Power 0 to 10 V for P 0 to 1 5 kW 4 OUTPUT_ENABLE_D I...

Page 36: ...ch is utilized between the ports and isolated ground Open Floating Close Grounding Port of digital Signal output The internal resistance of the ports is 5 1 kohm and a pull up power supply Vpull up is...

Page 37: ...nt mode selection in step B The reverse time can be adjusted from 0 4us to 10 0us The frequency can be adjusted from 5kHz to 400kHz When in Power mode the command can be adjusted from 0 to 1 5 kW when...

Page 38: ...fined in chapter 6 4 to operating 3 Set Pulse reverse time and Pulse frequency Remote to PSU Byte 0 1 2 3 4 5 6 7 8 9 10 IP Command Data1 Data2 Check Sum Termination Byte H Byte L Byte H Byte L Byte H...

Page 39: ...0x00 0x0D Pulse reverse time IP 0x29 0x00 01 0x00 0x00 Value 0x00 Value 0x00 0x0D Pulse frequency IP 0x2A 0x00 01 0x00 0x00 Value 0x00 Value 0x00 0x0D 4 Set Operating mode Remote to PSU Byte 0 1 2 3 4...

Page 40: ...oltage that is in specification Turn on the output power with a dummy load to ensure if it is under normal operation Contactor Interlock 10 Uninstallation of contactor pin in D sub connector Check if...

Page 41: ...er off while output reaches setting Energy Monitor Setting is end Press and hold OFF button with 10 second to clear error Warning Condition Code Description Suggested Action Output Limit Limit Output...

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