5
3.2 Product Features
Large displacement in XYZ.
Closed-loop strain gauge sensor, high positioning accuracy.
Mainly used in low frequency or static application.
3.3 Motion direction
Y180/Z300um. The flexure hinge mechanism ensures that the XYZ-dimensional motion
has no coupling, and features no mechanical friction, fast response speed, high repeatable
positioning accuracy, high flexibility, easy to operate, so it can meet different applications.
This product can also be customized according to the needs.
XD601-D2 is mainly used in biotechnology, interferometry, quality detection, optical
detection, nano-positioning, microscopy and imaging, image processing and other fields.
FIG. 1 Motion direction of XD601-D2 piezo nanopositioning stage
X
X
Y
