Product description
Use
The COBRA DS vacuum pumps are designed for use in the field of
microelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the system corresponds in design to applicable local and na-
tional safety regulations and that all applicable safety measures are
followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.
The allowed maximum inlet gas temperature depends on the inlet
pressure and the type of gas: the lower the inlet pressure (Pa), the
higher the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum pump is intended for use in a potentially non-explosive
environment.
As far as temperature is concerned, the pump is suitable for continuous
duty at any pressure between atmosphere and ultimate pressure.
Max. permissible number of startings per hour: 6.
Operating principle
The COBRA DS 0080-2000 G vacuum pumps are COBRA NS screw
vacuum pumps with cooling water and nitrogen circuits.
The COBRA NS screw vacuum pumps are driven by water-cooled
motors.
COMBI
The COBRA DS 080 - 0160 G pumps are streamlined DP screw
vacuum pumps. The COBRA DS 0700/ 1000/ 2000 G pumps are a
combination of a screw vacuum pump (DP) and a Roots vacuum pump
(MB). The Combi pumps are streamlined.
DS 0080-2000 G
Product description
0870772712 (En)
Page 9
Nitrogen supply
Cooling water outlet
Cooling water inlet
DGR 1
DGR 2
TV
CWR 1
Process gas
discharge
Process gas
inlet
PRV
TS 2
OSG 1
TS 1
OSG 3
OSG 4
DP
MB
PS
MPS 2
OSG 2
MPS 1
CWM
11
1
Inlet
2
Discharge
3
Oil
4
Cooling water
5
Barrier gas
6
Cooling liquid
7
Pumped gas
8
Screw rotors
9
Motor klixon
10 Dilution gas
11 Roots rotors
TS 1 Temperature sensor
DGF Nitrogen flow meter, dilution
gas
PGR Nitrogen pressure reducer
PS Inlet pressure switch
PRV Outlet pressure regulator
OSG 1 Oil level indicator (DP)
OSG 2 Oil level indicator (DP)
OSG 3 Oil level indicator (MB)
OSG 4 Oil level indicator (MB)
MPS 1 Power sensor (DP)
MPS 2 Power sensor (MB)
TV Thermostatic valve
CWR 1 Cooling water valve for
rear bearing (option)
CWR 2 Cooling water valve for
motors/ drive
DGR 1 Regulating valve, dilution
gas
DGR 2 Regulating valve, dilution
gas
CWM Cooling water flow meter
TS 2 Temperature sensor for
thermostatic valve
