Product description
Use
The COBRA BC vacuum pumps are designed for use in the field of
microelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the system corresponds in design to applicable local and
national safety regulations and that all applicable safety measures
are followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.
The allowed maximum inlet gas temperature depends on the inlet
pressure and the type of gas: the lower the inlet pressure (Pa), the
higher the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum pump is intended for use in a potentially non-explosive
environment.
As far as temperature is concerned, the vacuum pump is suitable for
evacuation of a 300 liters tank. The vacuum pump is not suitable for
continuous duty at a pressure more or equal than 150 (hPa) mbar.
Caution, the operating cycle of 150 (hPa) mbar must not exceed more
than 5 min.
For other applications, contact your Busch representative.
- Maximum inlet pressure: 1 bar (abs).
- With pump running at full speed, do not expose to inlet pressure
> 300 (hPa) mbar.
The vacuum pump is tight down to ultimate pressure.
Operating principle
COMBI
The COBRA BC 0601 G pumps are a combination of a screw vacuum
pump NW 0090 A (DP) and a Roots vacuum pump WY 0700 D (MB)
Product description
Page 5
BC 0601 G
0870235875
(En)
DP
7
4
2 5
3
8
1
6
4
MB
1 Inlet
2 Outlet
3 Oil
4 Cooling water
5 Barrier gas
6 Motor klixon DP
7 Intake medium
8 Screw rotors
9 Roots lobe
10 Motor klixon MB
Process gas inlet
Process gas
outlet
Cooling water
inlet
Cooling water
outlet
Nitrogen inlet
DGF Nitrogen flow meter, dilution gas
PRV Nitrogen pressure reducer
PSA Pressuresensor
TS3 Sensor PT100
OSG 1 Oil level indicator (DP)
OSG 2 Oil level indicator (MB)
OSG 3 Oil level indicator (MB)
MOT 1 Motor (DP)
MOT 2 Motor (MB)
CWM Cooling water flow meter
VFD 1 Frequency inverter (MB)
CWR Cooling water regulating valve
DGR 2 Regulating valve, dilution gas
DGR 1 Regulating valve, dilution gas
MV Nitrogen solenoid valve, dilution gas
TS 1 Klixon (DP)
TS 2 Klixon (MB)
OSG2 MOT2 TS2
VFD1
CWR
CWM
TS1
MOT1
OSG1
PSA
DGR 1
DGR 2
MV
DGF
PRV
TS3
OSG3
Summary of Contents for COBRA BC 0601 G
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