4-7
Model SLA7840
Section 4 Maintenance
& Troubleshooting
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Table 4-3 Model SLA7840 Standard Restrictors
Range
SCCM Nitrogen Equivalent Flow
Part Number*
Size
Low
High
ACLFE
Wire Mesh
D
8.038
11.38
S-110-Z-275-BMG
G
22.05
31.23
S-110-Z-278-BMG
J
43.23
61.21
S-110-Z-280-BMG
M
118.6
167.9
S-110-Z-283-BMG
P
232.5
329.3
S-110-Z-285-BMG
Q
325.4
460.9
S-110-Z-286-BMG
R
455.7
645.3
S-110-Z-287-BMG
U
1250.
1771.
S-110-Z-290-BMG
W
2451.
3471.
S-110-Z-292-BMG
1
6724.
9523.
S-110-Z-317-BMG
3
13176.
30060.
S-110-Z-226-BMG
*Materials: BMG = 316 Stainless Steel Electropolished
NOTES: • If two sizes are allowed because of overlap, select the larger size.
• Restrictor size not required to enter order.
If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.
Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.
