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Model SLA7840

Installation and Operation Manual

X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009

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Summary of Contents for SLA7840

Page 1: ...Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 Model SLA7840 5 Brooks Model SLA7840 Remote Transducer Pressure Flow Controller Model SLA7840D Digital I O DeviceNetTM Model SLA...

Page 2: ...itutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualifi...

Page 3: ...chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performanc...

Page 4: ...Model SLA7840 Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 5: ...10 Electrical Interface Analog I O 2 4 2 11 Operation Check Procedure Analog I O 2 5 2 12 Electrical Interface DeviceNet I O 2 6 2 13 Electrical Interface Analog I O 2 6 Section 3 Operation 3 1 Overvi...

Page 6: ...nnector Shielded Cable Hookup Diagram Voltage I O Version 2 6 2 3 Common Electrical Hookups for 15 Pin D Connector Voltage I O Version 2 6 3 1 Flow sensor Operational Diagram 3 2 3 2 Model SLA7840 Sys...

Page 7: ...egral PID control electronics and a control valve maintains a desired set pressure In addition to the pressure function the Model SLA7840 provides a 0 5 V signal that is linear with mass flow rate The...

Page 8: ...i range capabilities to reduce customer inventory Storage and pre programming of up to 10 gas calibrations easily permits users to switch between different gases and ranges on a single device Also the...

Page 9: ...ansducer maximum 500 psig External Sensor Input Suitable for pressure sensors with maximum 0 10 Vdc output signals Pressure Control Range 20 1 Pressure Settling Time Less than 1 second typical for a 2...

Page 10: ...seals Nickel Valve seat 316L stainless steel standard Internal Wetted Surface Finish 32 Ra maximum Dimensions Refer to Figures 1 1 and 1 2 Process Connections 1 4 male VCRTM standard Electrical Chara...

Page 11: ...valve to command setpoint Connected to signal at or above 5 0 Volts maximum 16 Vdc valve is forced open Connected to signal at or below 0 0 Volts minimum 1 Vdc valve is forced closed 5 Volt Reference...

Page 12: ...stallation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 Figure 1 1 Model SLA7840A Analog I O Controller with 1 4 VCR Connections Figure 1 2 Model SLA7840D Digital I O De...

Page 13: ...0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Remove the envelope conta...

Page 14: ...of form RPR003 1 Brooks Instrument Decontamination Statement A copy of this form can be downloaded from the Brooks website www brooksinstrument com or is available from any Brooks Instrument location...

Page 15: ...w sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter 100 sccm 1 micron 500 s...

Page 16: ...trolled using analog 0 5 Vdc signals The minimum set of connections which must be made to the Model SLA7840 RT includes 15 Vdc supply common and a setpoint signal The setpoint signal is supplied as a...

Page 17: ...If flow output signal does not match setpoint and pressure settings are correct this could indicate a problem in the RT A secondary issue could be the gas type When checking with a surrogate gas ensu...

Page 18: ...his connector is specified in the DeviceNet Specification Vol 1 Section 9 3 6 3 and is defined as a male sealed micro style connector The figure below illustrates the electrical connections to the dev...

Page 19: ...linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the RT A B constant The full scale flow rate of the...

Page 20: ...lve A system block diagram is shown in Figure 3 1 The integration of mass flow sensor control electronics and control valve into one unit results in a compact size The mounting dimensions are comparab...

Page 21: ...Section 3 Operation Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 Figure 3 2 Model SLA7840 System Block Diagram Figure 3 3 Model Typical Application of Down...

Page 22: ...user to establish the RT setpoint The usable range of this input is from 0 to 5 5 Vdc which corresponds to 0 to 110 of the RT full scale flow rate Setpoints below 50 mV will be treated as 0 volt setpo...

Page 23: ...mode then returns to normal operation Typical time required to change modes is approximately 0 5 seconds NOTE It is recommended to change operating modes during no flow conditions F Zeroing the RT Sel...

Page 24: ...mode the user must use the Brooks Service ToolTM to switch between the various active gas calibration data sets For more information about the Brooks Service Tool please contact your nearest Brooks s...

Page 25: ...rovides the following information Troubleshooting Application Information 4 2 Troubleshooting If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flamma...

Page 26: ...1 Restore the conditions to the values as they appear on the order This section contains suggestions to help diagnose RT related problems in the gas distribution system and answers commonly asked ques...

Page 27: ...about its environment Adaptive valve control helps to match the valve performance to the gas pressure and temperature of actual use The RT must be returned to the factory or a trained field service te...

Page 28: ...either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmmeter reading will be obtained Pin 4 to Pin 2 Nominal 1100 ohms reading depending on Pin 4 to Pin 3 Pin 5 to Pin 1 Nomina...

Page 29: ...gas is Carbon Dioxide CO2 The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 740 55 5 sccm of CO2 In order to calculate the conversion factor for a gas mixture the following form...

Page 30: ...estrictor assembly has been contaminated with foreign matter the pressure drop versus flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the re...

Page 31: ...110 Z 290 BMG W 2451 3471 S 110 Z 292 BMG 1 6724 9523 S 110 Z 317 BMG 3 13176 30060 S 110 Z 226 BMG Materials BMG 316 Stainless Steel Electropolished NOTES If two sizes are allowed because of overlap...

Page 32: ...4 8 Model SLA7840 Section 4 Maintenance Troubleshooting Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 THIS PAGE INTENTIONALLY LEFT BLANK...

Page 33: ...lig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolg...

Page 34: ...se refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de...

Page 35: ...le des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c...

Page 36: ...van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks...

Page 37: ...rd p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine S...

Page 38: ...doitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Referenc...

Page 39: ...Model SLA7840 Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 40: ...is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customer...

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