Brooks Automation
FluidX
Part Number: 281947 Rev. C
Brooks Automation, Inc.
Information provided within this document is subject to change without notice, and
although believed to be accurate, Brooks Automation, Inc. assumes no responsibility for
any errors, omissions, or inaccuracies.
ABF™, AcuLigner™, Advan Tag™, Align™, AquaTran™, AutoTeach™, ATR™,
AXM™, Basic Blue™, BioStore™, BiSymmetrik™, CenterSmart™, Cool Solutions™,
Crate to Operate™, CrossingConnect™, Cryotiger™, DARTS™, Enerta™, e-RMA™,
e-Spares™, e-Volution™, Falcon™, FastRegen™, FIXLOAD™, FrogLeg™,
Independent Twin Linear Exchange™, InCooler™, InLigner™, Interface™, Isoport™,
ITLX™, Jet™, Jet Engine™, LEAP™, LowProfile™, M2 Nano™, PASIV™,
PowerPak™, PerformanceBlue™, Plate Auditor™, PowerPak™, PowerTools™,
QuadraFly™, Radius™, Radient™, Radient Express™, RapidThaw™, Reliance™,
Reliance ATR™, RetroEase™, SCARA™, SmartPM™, SPOTLevel™, Sprint™,
Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time
Optimal Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Tube
Auditor™, Ultimate Blue™, VAC-407™, VacuTran™, VersaPort™, and WaferEngine™
are trademarks of Brooks Automation, Inc.
AcuTran®, AquaTrap®, Asyst®, the Cool Solutions logo, Crossing Automation®,
Cryodyne®, Cryo-Torr®, Fusion®, GOLDLink®, Guardian®, GUTS®, Helix®,
Leapfrog®, MagnaTran®, MapTrak®, Marathon®, Marathon 2®, Marathon Express®,
On-Board®, Polycold®, Razor®, REMP®, Spartan®, TrueBlue®, TurboPlus®, Vision®,
Xpeel®, XTape®, Zaris®, the Brooks logo, and the Brooks Life Sciences logo are
registered U.S. trademarks of Brooks Automation, Inc.
All other trademarks are properties of their respective owners.
© 2020 Brooks Automation, Inc. All rights reserved. The information included in this
manual is proprietary information of Brooks Automation, Inc. and is provided for the use
of Brooks customers only and cannot be used for distribution, reproduction, or sale
without the express written permission of Brooks Automation, Inc.
This technology is subject to United States export Administration Regulations and
authorized to the destination only; diversion contrary to U.S. law is prohibited.
Original manual printed in English.
ii
Copyright © 2020, Brooks Automation, Inc.
