Brooks Automation
FluidX
Part Number: 281947 Rev. C
9. Preventative
Maintenance
Periodically clean the scanning window with a moist,
non-abrasive cloth to allow the best performance of the
device. The following are safe to use for cleaning as
needed:
l
IPA (Isopropyl Alcohol)
l
70% alcohol
l
Cleanroom wipes
l
Mild detergents
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