1-1
Brooks
®
Model 5850i
Section 1 Introduction
Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
November, 2008
1-1 Purpose
The Brooks
®
Model 5850
i
Mass Flow Controller is a mass flow
measurement device designed for accurately measuring and rapidly
controlling flows of gases. This instruction manual is intended to provide
the user with all the information necessary to install, operate and maintain
the Brooks 5850
i
Mass Flow Controller. This manual is organized into five
sections:
Section 1
Introduction
Section 2
Installation
Section 3
Operation
Section 4
Maintenance
Section 5
Parts List
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5850
i
.
1-2 Description
The Brooks Model 5850
i
Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5850
i
consists of
three basic units: a flow sensor, a control valve and an integral electronic
control system. This combination produces a stable gas flow, which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:
Fast Response Control
permits rapid gas settling times with little or no
over/undershoot. Refer to Figure 1-1.
Soft Start
provides a flow ramping function which slows down the
introduction of the process gas for those processes which cannot tolerate
rapid flow transition. Refer to Section 2-7 and Figure 1-2.
Valve Override
permits the user to fully open and close the control valve
independent of the setpoint (command) setting. Refer to Section 2-6.
Setpoint
(Command) permits the user to program the mass flow controller
with an external 0-5 Vdc or 4-20 mAdc signal. Refer to Section 2-6.
Low Command Valve Inhibit
(Auto Shutoff) prevents the valve from
opening whenever the setpoint is less than 2% of full scale.
Removable Cleanable Sensor
permits the user to clean or replace the
sensor. Refer to Section 4-4.
Output Limiting
prevents possible damage to delicate data acquisition
devices by limiting the output to -0.7 Vdc and +6.8 Vdc on the voltage
signal output and 0 to 26 mA on the current output.
