i
Brooks
®
Model 5850i
Contents
Installation and Operation Manual
X -TMF-5850i-MFC-eng
Part Number: 541B108AAG
November, 2008
Section 1
Introduction
Paragraph
Page
Number
Number
1-1
Purpose ............................................................................. 1-1
1-2
Description ........................................................................ 1-1
1-3
Specifications .................................................................... 1-3
Section 2
Installation
2-1
Receipt of Equipment ........................................................ 2-1
2-2
Recommended Storage Practice ...................................... 2-1
2-3
Return Shipment ............................................................... 2-2
2-4
Gas Connections ............................................................... 2-2
2-5
Installation ......................................................................... 2-3
2-6
In-Line Filter ...................................................................... 2-4
2-7
Electrical Interfacing .......................................................... 2-5
2-8
Configuring the PC Board ................................................. 2-7
Section 3
Operation
3-1
Theory of Operation .......................................................... 3-1
3-2
Operating Procedure ......................................................... 3-2
3-3
Zero Adjustment ................................................................ 3-3
3-4
Calibration Procedure ........................................................ 3-4
3-5
Response .......................................................................... 3-8
Section 4
Maintenance
4-1
General ............................................................................. 4-1
4-2
Troubleshooting ................................................................. 4-1
4-3
Sensor Tube ...................................................................... 4-6
4-4
Disassembly and Assembly ............................................... 4-6
4-5
Use of the Conversion Tables .......................................... 4-10
4-6
Use of Orifice Sizing Nomograph ..................................... 4-11
4-7
Restrictor Sizing ............................................................... 4-15
Section 5
Parts List
5-1
General ............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment ......................... A-1
