BRONKHORST VDM Series, Instruction Manual

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Bronkhorst®
Instruction Manual Vapor Delivery Module 9.17.079D 16
4.6.1.2 Starting process
Procedure Actions
B1 Set the heater at right temperature
·
Give set point to the heater; wait until the
temperature is stabilized
B2 Start gas flow
·
Give setpoint to MFC
Make sure that the carrier gas is always flowing when
the liquid flow is on. Preferably, let always gas flow in
the carrier gas line when the system is filled with liquid.
B3 Start liquid flow
·
Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the
process. The pressure controller of the inert gas supply
can influence the stability of the liquid flow controller.
B4 Connect process
·
Open V7, close V6
4.6.1.3 Stopping process
Procedure Actions
C1 Disconnect process
·
Open V6, close V7
C2 Stop liquid flow
·
Give setpoint = 0 to LFC
C3 Optional: Stop gas flow
·
Give setpoint = 0 to MFC
Make sure that the carrier gas is always flowing when
the liquid flow is on. Preferably, let always gas flow in
the carrier gas line when the system is filled with liquid.
4.6.1.4 Leaving system overnight
Procedure Actions
D1 Relieve the supply pressure from the liquid- and
carrier gas lines
·
Close V2 and V3
4.6.1.5 Emptying and purging system
Procedure (1,2) Actions
E1 Relieve the supply pressure from the liquid- and
carrier gas lines
·
Close V2 and V3
E2 Purge liquid out of lines
·
Open V1 and V5
E3 Purge lines with inert gas
·
Open V4, V6
·
Close V7
·
Give setpoint to MFC
E4 Optional: purge with inert liquid Connect inert liquid to inert gas supply, proceed from E2
E5 Optional: alter E3 and E4 for a few times
(1) If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing liquid in the
system.
(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully (preferably with
inert liquid, E3, E4, E5) before opening the system.
·
In case of non-pure liquids, place a filter upstream the liquid flow controller.
·
Mount the VDM upright.