Bronkhorst®
Instruction Manual Vapor Delivery Module
9.17.079D
15
4.6
Purging and filling
4.6.1
Starting up without using vacuum
4.6.1.1 Filling system
Procedure
Actions
A1
Purge all lines
·
Close V2, V3 and V7
·
Open V1, V4, V5 and V6
·
Give setpoint 100% to MFC
·
Give setpoint 0% to LFC
·
Purge for a long time.
A2
Setup carrier gas supply
·
Close V4
·
Open V3
A3
Fill the system with liquid.
·
Close V1
·
Open V2 briefly; allow mixing valve VDM to fill.
·
Wait until all gas bubbles left the system via Purge out
and V5, then close V5.
Make sure that the carrier gas is always flowing when
the liquid flow is on. It is preferred to always have gas
flowing in the carrier gas line when the system is filled
with liquid.
A4
The system is now ready for use.
