BRONKHORST VDM Series Instruction Manual Download Page 5 | Manualshive

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Bronkhorst®

Instruction Manual Vapor Delivery Module

9.17.079D

5

Table of contents

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Introduction

1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.1

Scope of this manual

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.2

Intended use

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.3

Other documents

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Starting up

2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.1

Functional properties

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.2

Rated pressure test inspection

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.3

Install module

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.4

Model key

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Technical specifications

3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

3.1

Physical dimensions

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

3.2

Ambient conditions

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

3.3

Ingress protection class

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

3.4

Fluidic connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Flow ranges of used components

3.4.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Capacity

3.4.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Pressure rating

3.4.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

3.5

Piping

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

3.6

Electrical connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Mains

3.6.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Tracing

3.6.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Pt100 tracing sensor

3.6.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Communication

3.6.4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

RS232 / ProPar

3.6.4.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

FLOW-BUS

3.6.4.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

3.7

Connectors (hook-up diagram)

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Installation

4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.1

Mounting

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.2

Fluidic connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.3

Supply pressure

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.4

Leak check

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.5

Seals

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

4.6

Purging and filling

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Starting up without using vacuum

4.6.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Filling system

4.6.1.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Starting process

4.6.1.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Stopping process

4.6.1.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Leaving system overnight

4.6.1.4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Emptying and purging system

4.6.1.5

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

Starting up using vacuum

4.6.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

Filling system

4.6.2.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

Starting process

4.6.2.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Stopping process

4.6.2.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Leaving system overnight

4.6.2.4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Emptying and purging system

4.6.2.5

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

Operation

5

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Summary of Contents for VDM Series

Page 1: ...2018 ATTENTION Pleaseread this Instruction Manualcarefully beforeinstalling and operating theinstrument Notfollowing theguidelines could resultin personalinjury and ordamageto theequipment Vapor Delivery Module Instruction Manual ...

Page 2: ...mationwill facilitatetheuseoftheinstrument and or contributetoitsoptimal performance Additional infoavailableontheinternet or from your local salesrepresentative Receipt of equipment Check the outside package box for damage incurred during shipment If the box is damaged then the local carrier must be notified at once regarding his liability if so required At the same time a report should be submit...

Page 3: ...product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read the operating information carefully before using the product Before operating make sure the line cord is connected to a properly grounded power receptacle Inspect the connecting cables for cracks or breaks before each use The equipment a...

Page 4: ...Bronkhorst Instruction Manual Vapor Delivery Module 9 17 079D 4 ...

Page 5: ...Electrical connections 11 Mains 3 6 1 11 Tracing 3 6 2 12 Pt100 tracing sensor 3 6 3 12 Communication 3 6 4 12 RS232 ProPar 3 6 4 1 12 FLOW BUS 3 6 4 2 13 3 7 Connectors hook up diagram 14 Installation 4 14 4 1 Mounting 14 4 2 Fluidic connections 14 4 3 Supply pressure 14 4 4 Leak check 14 4 5 Seals 15 4 6 Purging and filling 15 Starting up without using vacuum 4 6 1 15 Filling system 4 6 1 1 16 S...

Page 6: ...Buttons 5 2 1 19 Display 5 2 2 20 Select instrument 5 2 3 21 Temperature and flow setpoints 5 2 4 21 5 3 Operational settings 22 Operation example 5 3 1 23 Vapor pressure of water 5 3 2 24 Troubleshooting and service 6 24 6 1 Common issues 25 6 2 Maintenance 25 6 3 Service 26 Removal and return instructions 7 ...

Page 7: ...ity intendeduse cleaningandcorrosionresistanceofthe usedmaterialsagainst themeteredmedialiessolelywiththeenduser Bronkhorst High TechB V cannot beheldliablefor anydamageresultingfrom improper useor usefor other thanthe intendedpurpose 1 3 Otherdocuments Manuals and guides for digital instruments are modular General instructions give information about the functioning and installation of instruments...

Page 8: ...Bronkhorst Instruction Manual Vapor Delivery Module 9 17 079D 8 Manualsandsoftwaretoolingcanbefoundat http www bronkhorst com en downloads ...

Page 9: ...isspecified ontheinstrument witharedsticker Ifthissticker ismissingor ifthespecifiedpressureisinsufficient theinstrument must not beusedandshouldbereturnedtothefactory Beforeinstallation makesurethat thetestedpressureisinaccordancewiththesafetyfactor ofyour application Thetested pressuremust alwaysbehigher thanthemaximum operatingpressure Disassemblingtheinstrument and or replacingpartsofit will i...

Page 10: ... combination with elastomeric O rings to seal to the VDM Occasionally fittings are orbital welded to the VDM For leak tight installation of compression type fittings be sure that the tube is inserted to the shoulder in the fitting body and that no dirt or dust is present on tube ferrules or fittings For exact informationonthefitting pleasecontact Swagelokfor further instructionsor documentation Al...

Page 11: ...SW 10n n 30 a nn a 220 240 250VA 50 60 Hz T1A I2t 10A Littelfuse 0213001 MXP T4A T1A SW 10n n 31 a nn a 220 240 550VA 50 60 Hz T1A I2t 10A Littelfuse 0213001 MXP T4A T1A SW 20n n 30 a nn a 220 240 250VA 50 60 Hz T1A I2t 10A Littelfuse 0213001 MXP T4A T1A SW 20n n 31 a nn a 220 240 550VA 50 60 Hz T1A I2t 10A Littelfuse 0213001 MXP T4A T1A Littelfuse or equivalent For mains connection use appropriat...

Page 12: ...0 Measurement current through the sensor is 0 5 mA For Pt100 connection use appropriate cabling with M12 4 pin female connector art nr 1 09 593 Makesurethat thetemperaturesensor isproperlymountedwiththetracingwire otherwisenotemperaturecontrol is possibleandhazardoussituationsmayoccur 3 6 4 Communication 3 6 4 1 RS232 ProPar For further instructionsabout theRS232 interfaceseemanual 9 17 027 Manual...

Page 13: ...Bronkhorst Instruction Manual Vapor Delivery Module 9 17 079D 13 3 7 Connectors hook up diagram ...

Page 14: ...gs please contact Swagelok for further instructions or documentation PleasebeawarewhenusingOxygen O2 that thefittingsmountedinthegaslineshouldbeabsolutelyoxygenclean 4 3 Supply pressure Do not apply pressure until electrical connections are made When applying pressure to the system make sure that the pressure is increased gradually and avoid pressure shocks in the system 4 4 Leak check Checkthesys...

Page 15: ...MFC Give setpoint 0 to LFC Purge for a long time A2 Setup carrier gas supply Close V4 Open V3 A3 Fill the system with liquid Close V1 Open V2 briefly allow mixing valve VDM to fill Wait until all gas bubbles left the system via Purge out and V5 then close V5 Makesurethat thecarrier gasisalwaysflowingwhen theliquidflowison It ispreferredtoalwayshave gas flowinginthecarrier gaslinewhenthesystem isfi...

Page 16: ...ethat thecarrier gasisalwaysflowingwhen theliquidflowison Preferably let alwaysgasflowin thecarrier gaslinewhenthesystem isfilledwithliquid 4 6 1 4 Leaving system overnight Procedure Actions D1 Relieve the supply pressure from the liquid and carrier gas lines Close V2 and V3 4 6 1 5 Emptying and purging system Procedure 1 2 Actions E1 Relieve the supply pressure from the liquid and carrier gas lin...

Page 17: ...rier gas Close V8 Open V3 A7 Fill the system with liquid Close V1 Open B2 briefly allow mixing valve VDM to fill Close V5 Makesurethat thecarrier gasisalwaysflowingwhen theliquidflowison Preferably let alwaysgasflowin thecarrier gaslinewhenthesystem isfilledwithliquid A8 Optional degassing mixing valve Open V5 a needle valve will be best to avoid too much liquid be pumped away A9 The system is now...

Page 18: ... seconds 4 6 2 5 Emptying and purging system Procedure 1 2 Actions E1 Relieve the supply pressure from the liquid and carrier gas lines Close V2 and V3 E2 Purge liquid out of lines Open V1 and V4 E3 Purge lines with inert gas Open V4 and V6 Close V7 Give setpoint to MFC E4 Evacuate liquid lines cont Close V1 Open V8 E5 Optional repeat last two steps for a few times 1 Iftheliquidisreactiveor aggres...

Page 19: ... Enter selected menu Enter edit mode Confirm selection changes Menu selection up Select information field Next character in edit mode Up in table Menu selection down Select information field Previous character in edit mode Down in table Return to previous screen Undo cancel and exit edit mode Switch content in the Custom readout 2 field Top line Custom readout 1 Measure readout Custom readout 2 5 ...

Page 20: ...l the red line appears above Custom readout 2 than press to activate this field Security settings can be set to avoid unauthorised access to this option The number of displays that have the same instrument selected must not exceed 3 The integrated Instruments will be indicated with their node addresses Press or to search for an instrument on the bus While the message search is displayed the VDM is...

Page 21: ...splay info in the E 8000 manual 9 17 076 for more detailed information After the last digit is confirmed by pressing the setpoint will be sent to the instrument If the entered setpoint is ignored check controller mode See section Controller mode in the E 8000 manual 9 17 076 for more detailed information The button can be used to exit the edit mode and cancel the changes Thischapter explainsthemos...

Page 22: ...hisratio can besetbytheflow controllerswhich arepartof theVDM Calculation examplefor setting of relativehumidity At atmospheric pressure at 80 C 2 ln min Air has to be moistened Which water flow is needed for a r h of 50 The vapor pressure of water at 80 C is 473 3 mbar according to FLUIDAT FLUIDAT ontheNet Bronkhorst sinteractiveFlowCalculationsandroutinesgeneratingPhysical Properties Visit www f...

Page 23: ...Bronkhorst Instruction Manual Vapor Delivery Module 9 17 079D 23 5 3 2 Vapor pressure of water ...

Page 24: ... Improve insulation No Liquid flow 1 Wrong controller mode LFC Check controller mode LFC 2 No setpoint Give Setpoint No Gas flow 1 Wrong controller mode MFC Check controller mode MFC 2 No Setpoint Give Setpoint No vapor stream 1 No gas supply Check gas supply 2 No liquid supply Check liquid supply Liquid in process chamber 1 Mixture saturated condensation 1 Increase setpoint Heater 2 Increase setp...

Page 25: ...te http www bronkhorst com Do you have any questions about our products Our Sales Department will gladly assist you selecting the right product for your application Contact sales by e mail sales bronkhorst com For after sales questions our Customer Service Department is available with help and guidance To contact CSD by e mail support bronkhorst com No matter the time zone our experts within the S...

Page 26: ...ropriate shipping container if possible use the original packaging box Add documentation Reason of return Failure symptoms Contaminated condition Declaration on decontamination It is absolutely required to notify the factory if toxicordangerous fluids have been in contact with the device Thisistoenablethefactorytotakesufficient precautionarymeasurestosafeguardthestaffintheir repair department All ...

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