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5.5.1 User Spinner Configuration Screen
The User Spinner Configuration Screen allows the user to set parameters for the
Cee
®
200X tool’s spin module operation. Not all parameters are available to all user
levels.
The controls and indicators found on the User Spinner Configuration screen are listed
below:
1. Dispense Name column:
Allows the user to label each dispense with a unique
name to identify the material dispensed.
2. Has Empty column:
Allows the user to specify which empty sensor is connected to
which dispense. Usually this feature is configured before the tool leaves the factory
and needs no adjustment.
3. Centering Speed:
Clicking in this box brings up a numeric pad to allow entry of the
desired speed for centering.
4. Centering Time:
Clicking in this box brings up a numeric pad to allow entry of the
desired time for the the substrate to spin during the centering process. For more
information on how this parameter affects operation, go to Centering a Substrate.
5. Idle Exhaust:
Clicking in this box brings up a numeric pad to allow entry of the Idle
Exhaust parameter, which is the position that the exhaust will go to after a spin
process is complete. (Programmable exhaust is not available on all models.)
6. Enable Vacuum Chuck:
If this setting is NOT checked, the Cee
®
200X spin coater
will run processes WITHOUT the vacuum sensor being activated.
