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5.2.3 Starting a Process
Once the substrate is on the spin chuck at a desired position, pressing the Start
Process (Process) button will begin the process. For the duration of the process, the lid
must remained closed.
5.2.4 Aborting a Process
After a process has started, pressing the Abort button will abort the process. Aborting a
process sets the substrate in a position that allows the user to safely recover the
substrate.
Start Process
