-31-
Wavelength
The distance between two crests (peaks) of an electromagnetic light wave.
BASF works with customers to select the best wavelength(s) for the specific
measurement (See also
Micron
).
Recommended References:
The most comprehensive coverage of the basic physics can be found in Theory and Practice of
Radiation Thermometry, by David DeWitt and Gene Nutter, 1988 John Wiley & Sons.
The best coverage of wafer temperature measurement is found in Advances in Rapid Thermal
and Integrated Processing, Chapters 2, 3 and 4, edited by F. Roozeboom, Kluwer Academic
Publisher, the Netherlands, 1996.