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Figure 1: Block diagram of the ESD scanner.
2.2.
Main Components of ESD Scanner
SmartScan
SmartScan is the proprietary software controlling the hardware components and processing
the collected data.
Probe Movement Mechanism
The attached probe is moved to user-specified probing positions by one four-axis scara robot.
The robot facilities 4 degrees of movement: along x-axis, y-axis, z-axis, and 360° rotation
(both clockwise and counterclockwise directions).
Probe
The probes function by inducing an ESD disturbance pulse in the established DUT. Four
different probe types are available to inject magnetic (H) or electric (E) fields in directions of
x, y and z movement. The commercially available probe types are: Hz, Hx/y, Ez, and Ex/Ey.