24
Figure 29: XY Offset top view.
a.
A reference point has to be defined before doing the XY offset calibration. Click on the
"Reference Point" icon (
) in the main menu bar, choose a desired location on the DUT,
click left mouse button to locate the reference point. It is always recommended to place the
reference point at where users can align X and Y easily.
Figure 30: Define reference point.
b.
Click on the reference point, and define its height. The height definition procedures are the
same as defining the scan area height. If the height of the reference point is the same as the
height of the scan area defined in the previous procedure, user can type in the same height
number for the reference point. ‘Distance’ was given 1mm, but usually it is required to lower
it down even more to align X and Y direction precisely. ‘Retract’ is irrelevant in this
procedure.
Reference point