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precautions below completely and be sure to understand the contents.
Purpose of air-flush
Evacuating moisture or humid gas by vacuum pump can cause condensed water to
remain in pump. This remaining water can cause failure of ultimate pressure or
pump. Air-flush operation is necessary to exhaust the remaining water inside.
Air-flush operation does not only exhaust moisture but also restores ultimate
pressure.
Important
Maintenance interval of this pump is based on clean gas applications The standard differs
when evacuating vapor.
You must shorten maintenance interval (5.2[page 24]) when evacuating vapor since vapor temperature, disposal
volume, disposal frequency and substances in vapor have an influence on pump operation. When evacuating
vapor, pay attention to all WARNING, CAUTION and Important notes (4 [page 18
～
19]).
4.2.1 Preparation
Before starting air-flush operation, first stop vacuum pump and proceed in
accordance with the following procedure. Never try to do air-flush operation during
operation.
Fit air-muffler
①
Stop vacuum pump.
②
Remove plug from air-flush port with a spanner (nominal dia. 7mm).
③
Lightly fit the attached air-muffler to air-flush port.
※
Store the removed plug and do not misplace it.
4.2.2 Start-up and shut-down
①
Start vacuum pump according to 4.1.1 Operation [page 20].
②
Stop vacuum pump according to 4.1.2 Shut-down[page 20].
Important
※
Vapor disposal volume is max. 100g/day when doing air-flush operation
(ambient temperature 25
℃
, humidity 60%RH).
Air-flush port
Remove plug
Fit air-muffler
