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Document No.

Revision

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VS PD03 Scroll Pump and Components Replacement 

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2

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699910017 A 

Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to 
recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of 
unskilled, improper, or careless operation of the equipment can be serious. Every operator or service person must read 
and thoroughly understand operation/maintenance manuals and any additional information provided by Varian. All 
warning and cautions must be read carefully and strictly observed. Consult local, state, and national agencies 
regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your 
nearest Varian office.

Solvents

WARNING

The mechanical components of leak detectors may be cleaned with one of the 
recommended solvents. When heated, sprayed, or exposed to high-temperature 
equipment, these solvents become flammable and explosive, causing serious 
injury or death. Do not use these solvents near a high-temperature source. Ventilate 
the working area with a blower and work in a large, well-ventilated room.
Solvents are irritants, narcotics, depressants and/or carcinogens. Their inhalation 
and/or ingestion may produce serious side effects. Prolonged or continued contact 
with the skin results in absorption through the skin and moderate toxicity. Always 
ensure that cleaning operations are carried out in large, well-ventilated rooms, and 
wear eye shields, gloves, and protective clothing.
Due to the effective cleaning nature of VacuSolv solvent and its residue-free 
properties, Varian’ Component and Spectrometer Cleaning Kit (Part Number 
670029096), used in accordance with the kit instructions, is recommended for 
cleaning spectrometer components. The kit can also be used for fine cleaning of 
other parts in the leak detector’s vacuum system such as valves and fittings. No 
rinsing steps or high-temperature drying is required following cleaning with 
VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible 
with most materials and does not contain toxic chemicals or CFCs 
(chlorofluorocarbons). Other acceptable solvents are isopropyl alcohol (IPA) or 
Dow Corning

®

 OS-20.

To clean the leak detector plastic enclosure, the LCD display and Front Panel 
buttons, use only a soft cloth slightly dampened with water or a mild soap.
Do NOT use excess water or cleaning solvents of any kind.
Avoid splashing any cleaning solvents into the unit through the ventilation 
openings or Front Panel buttons. Wipe the surface with a dry lint-free cloth.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques that are 
more important in leak detector servicing than in general vacuum work:

CAUTION

Wear non-powdered, ESD-safe Nitride or equivalent gloves to prevent skin oils from 
getting on spectrometer internal components.

Summary of Contents for VS PD03

Page 1: ...ev A February 2009 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Page 2: ...use damage to the equipment or data loss WARNING Warnings appear for a particular procedure or practice which if not followed correctly could lead to serious injury or death Hazard and Safety Information The common international symbols used in this manual and on the equipment are defined below OFF Supply Power Earth Ground Terminal ON Supply Power Caution Hot Surface AC Alternating Current Cautio...

Page 3: ...ugh the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eye shields gloves and protective clothing Due to the effective cleaning nature of VacuSolv solvent and its residue free properties Varian Component and Spectrometer Cleaning Kit Part Number 670029096 used in accordance with the kit instructions is recommended for clean...

Page 4: ...fasteners must be installed and torqued per assembly procedure specifications Remove Metal Seals carefully with your fingers or a soft tool Metal tools scratch sealing surfaces Metal Seals are supplied in pre cleaned condition No cleaning is required If necessary Metal Seals can be cleaned using the recommended solvents Wipe Metal Seals clean with a lint free cloth before installation to ensure th...

Page 5: ...NG Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 1 Rear and Front Cover Screws and...

Page 6: ...nect the NW 16 connection Figure 2 NW 16 Connection Figure 2 NW 16 Connection 5 Tilt the unit and unscrew the four connections underneath that hold the pump Figure 3 Scroll Pump Mounting Con nections Place the unit flat again and remove the whole pump assembly Figure 3 Scroll Pump Mounting Connections ...

Page 7: ...t Page 6 of 17 699910017 A 6 Disconnect the exhaust hose Figure 4 Exhaust Hose Figure 4 Exhaust Hose 7 Disconnect the diaphragm fan and motor power connectors 8 Remove the fan assembly bracket and lay it aside Figure 5 Fan Assembly Mounts Figure 5 Fan Assembly Mounts ...

Page 8: ...p See Diaphragm Pump Replacement on page 12 14 Reattach the exhust valve See Exhaust Valve Replacement on page 10 15 Reattach the four M2 screws to remount the manifold block 16 Reattach the fan assembly 17 Reconnect the diaphragm fan and motor power connectors 18 Reconnect the exhaust hose 19 Attach the front cover and secure to the frame using existing hardware 20 Connect the power cord and powe...

Page 9: ...ING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 7 Rear and Front Cover Screws an...

Page 10: ...e Connectors 6 Mount the new valve and tighten 7 Reconnect the two spade connections 8 Attach the front cover and secure to the frame using existing hardware 9 Attach the rear cover and secure to the unit using existing hardware 10 Connect the power cord and power up the unit 11 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready wit...

Page 11: ...ING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 9 Rear and Front Cover Screws an...

Page 12: ...dy up and out 6 Mount new unit and replace the three Philips screws 7 Attach the front cover and secure to the frame using existing hardware 8 Attach the rear cover and secure to the unit using existing hardware 9 Connect the power cord and power up the unit 10 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Re...

Page 13: ...iews WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting any part of the system 1 Turn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Figure 11 Rear and Front Cover...

Page 14: ...ex connector to the Clippard valve Figure 12 Molex Connector Figure 12 Molex Connector 5 Remove the ground connection to the system body red arrow in Figure 13 Ground Connection Figure 13 Ground Connection 6 Disconnect the two M4 screws mounting the plate to the scroll pump assembly blue arrow in Figure 13 Ground Connection ...

Page 15: ...scroll pump 10 Reattach the ground and Molex connections 11 Attach the front cover and secure to the frame using existing hardware 12 Attach the rear cover and secure to the unit using existing hardware 13 Connect the power cord and power up the unit 14 Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes Refer to t...

Page 16: ...rn off the power switch located on the back of the unit and unplug 2 Wait 30 seconds for the high voltage to dissipate 3 Using an extended length M5 Allen wrench remove the four screws holding the rear plastic cover Fgure 15 Rear and Front Cover Screws and detach the rear plastic cover from the unit Fgure 15 Rear and Front Cover Screws NOTE Always change the valve plates diaphragm and sealing ring...

Page 17: ...e cooling fan the necessary operations must be carried out by turning or holding the counterweight 16 5 Change the diaphragm by see Figure 16 Pump Head Removal a Turning the fan to bring the structured diaphragm 9 to top dead center b Lifting the edge of the diaphragm and gripping it on opposite sides unscrewing it by turning counterclockwise CAUTION Ensure that the disc s spring 12 and diaphragm ...

Page 18: ...ently sideways in their recesses f Laying the sealing rings on the intermediate plate 7 Refit the pump heads by see Figure 16 Pump Head Removal a Turning the fan to bring the diaphragm to top dead center b Placing the intermediate plate 2 with valve plates 7 sealing rings 8 and head plate 3 on the housing in the position indicated by the M c Checking that the head plate is centered by moving it ge...

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Page 20: ...Japan Tel 81 3 5232 1253 Toll Free 0120 655 040 Fax 81 3 5232 1710 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Toll Free 080 222 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F...

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