Document No.
Revision
-
VS PD03 Scroll Pump and Components Replacement
Page
11
of 17
699910017 A
4. Unscrew the black cover using the Philips head screw, pull up the cover and disconnect (red arrow in Figure 10:
Figure 10: Unit Screws
5. Unscrew the two Philips head screws (blue arrow in “Figure 10: Unit Screws” on page 11) and pull the complete
black/grey body up and out.
6. Mount new unit and replace the three Philips screws.
7. Attach the front cover and secure to the frame using existing hardware.
8. Attach the rear cover and secure to the unit using existing hardware.
9. Connect the power cord and power up the unit.
10.Watch the home screen to verify the
Spectube Pressure Wait
message progresses to
Stabilization Wait
and
System
Ready
within ten minutes.
Refer to the operator's manual if the system fails to reach the
System Ready
mode.
11. Varian recommends a full calibration of the unit prior to leak test operations.
Summary of Contents for VS PD03
Page 19: ......
