Document No.
Revision
-
VS PD03 Scroll Pump and Components Replacement
Page
14
of 17
699910017 A
7. Remove the diaphragm pump assembly, turn it over and unscrew the four M2 screw holding the pump to the plate
(Figure 14: Pump to Plate Connections - two shown).
Figure 14: Pump to Plate Connections
8. Reattach the new pump to the plate.
9. Reattach the plate to the scroll pump.
10.Reattach the ground and Molex connections.
11. Attach the front cover and secure to the frame using existing hardware.
12.Attach the rear cover and secure to the unit using existing hardware.
13.Connect the power cord and power up the unit.
14.Watch the home screen to verify the
Spectube Pressure Wait
message progresses to
Stabilization Wait
and
System
Ready
within ten minutes.
Refer to the operator's manual if the system fails to reach the
System Ready
mode.
15.Varian recommends a full calibration of the unit prior to leak test operations.
Summary of Contents for VS PD03
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