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Vacuum Products Division
Manual 699910005, Hot Ion Source Replacement
Page 24
22.
Insert new filaments into a pair of couplers. Verify filament alignment as shown in Figure 3-10 and
Figure 3-11. Keep screws loose while aligning the filament position, then tighten screws securely
once aligned.
Figure 3-10. Filament positioning
Figure 3-11. Filament alignment