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Vacuum Products Division
Manual 699910005, Hot Ion Source Replacement
Page 8
Figure 2-3. Spectrometer exploded view
Pre-amp
plug
Ion source
plug
M6 screws
(10X)
Belleville conical
washers
(3X/Screw)
Top cover
Spectrometer
Header
Spectrometer
Body
Filaments
(2X)
Metal gasket
(NOT REUSABLE)
Posts (4X)
Ion source
header pins
Detector
Housing
Inlet