Agilent Technologies Eyesys Mini-B/A Instruction Manual Download

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Eyesys Mini-B/A Gauge Controller

RequestForReturnRevM.doc

22 March 2001

Pg. 2 of 2

Request for Return

Health and Safety Certification

FAILURE REPORT

(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

TURBO PUMPS and TURBOCONTROLLERS

CLAIMED DEFECT

POSITION

PARAMETERS

❐

Does not start

❐

Noise

❐

Vertical

Power:

Rotational Speed:

❐

Does not spin freely

❐

Vibrations

❐

Horizontal

Current:

Inlet Pressure:

❐

Does not reach full speed

❐

Leak

❐

Upside-down

Temp 1:

Foreline Pressure:

❐

Mechanical Contact

❐

Overtemperature

❐

Other:

Temp 2:

Purge flow:

❐

Cooling defective

❐

Clogging

………………….

OPERATION TIME:

Describe Failure :

TURBOCONTROLLER ERROR MESSAGE:

ION PUMPS/CONTROLLERS

VALVES/COMPONENTS

❐

Bad feedthrough

❐

Poor vacuum

❐

Main seal leak

❐

Bellows leak

❐

Vacuum leak

❐

High voltage problem

❐

Solenoid failure

❐

Damaged flange

❐

Error code on display

❐

Other

❐

Damaged sealing area

❐

Other

Describe failure:

Customer application:

LEAK DETECTORS

INSTRUMENTS

❐

Cannot calibrate

❐

No zero/high background

❐

Gauge tube not working

❐

Display problem

❐

Vacuum system unstable

❐

Cannot reach test mode

❐

Communication failure

❐

Degas not working

❐

Failed to start

❐

Other

❐

Error code on display

❐

Other

Describe failure:

Customer application:

ALL OTHER VARIAN PUMPS

DIFFUSION PUMPS

❐

Pump doesn’t start

❐

Noisy pump (describe)

❐

Heater failure

❐

Electrical problem

❐

Doesn’t reach vacuum

❐

Overtemperature

❐

Doesn’t reach vacuum

❐

Cooling coil damage

❐

Pump seized

❐

Other

❐

Vacuum leak

❐

Other

Describe failure:

Customer application:

Summary of Contents for Eyesys Mini-B/A

Page 1: ...Eyesys Mini B A Gauge Controller Manual No 699908205 Revision H November 2002 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Page 3: ...ding representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Sel...

Page 4: ...ated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious This product must only be operated and maintained by trained personnel Every operator or service person must read and thoroughly understand operation maintenance manuals and an...

Page 5: ...ted in a commercial environment This equipment generated uses and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is also likely to cause harmful radio communications interference in which case the user will be required to correct the i...

Page 6: ...ent do not turn on any such vacuum gauge Failure to follow this instruction could result in serious injury to personnel and damage to equipment Vacuum Equipment and Cleanliness Cleanliness is vital when servicing any vacuum equipment CAUTION Do not use silicone oil or silicone grease Use powder free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces Do not clean any...

Page 7: ...n Vacuum Technologies Customer Service at 1 800 8VARIAN Internet users Send email to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc com vacuum Order on line at www evarian com See the back cover of this manual for a listing of our sales and service offices ...

Page 8: ...ormative documents auf das sich diese Erklärung bezieht mit der den flogenden Norm en oder Richtlinie n übereinstimmt auquel se réfère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se ...

Page 9: ...ion of Conformity viii Eyesys Mini B A Gauge Controller 1 Description 1 Specifications 1 Options 2 Installation 2 Electrical 2 Mounting 4 Mini BA Tube Replacement Procedure 4 Dimensional Diagram 6 Display 7 Digital Display Option 7 Front Panel Controls 7 Emission ON OFF Button 7 System Reset 8 Emission High Low Switch 8 Degas ON OFF Button 8 Setpoint 1 and Setpoint 2 Switches 9 Remote Control Line...

Page 10: ...p 17 Switching from Local to Remote 17 Switching from Remote to Local 17 Local Remote Status 17 Remote Reset 18 Command Response Format 18 Command Set 18 Error Messages 20 Recommended Cabling 21 Address Selection 22 Request for Return Health and Safety Certification 23 Returned Materials Report 25 ...

Page 11: ...ing 5x 4 PHMS from Front and Rear of Case 4 2 Removal and Placement of Top Half Case Assembly 5 3 Removal of Socket Head Cap Screws and Lockwashers 5 4 Dimensional Diagram 6 5 Output Voltage as a Function of Pressure 12 A 1 RS232 Cabling 21 A 2 RS422 Cabling 21 A 3 RS485 Cabling 21 ...

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Page 13: ...Gauge Controller Specifications 1 2 Eyesys Mini BA Options 2 3 Standard Mini BA and RS 232 Option 2 4 RS 422 and RS 485 Options 3 5 Bargraph Display Indicators 7 6 15 Pin Inputs and Outputs 10 7 Voltage Outputs 12 8 Gas Correction Factors 14 A 1 Command Set 18 A 2 Eyesys Error Messages 20 ...

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Page 15: ...0 9 mbar 2x10 9 Torr Input Power Supply Required 24 VDC 10 at 0 500A Output Signal 1 9V 1V Decade Logarithmic Output Impedance 100 Ohms Minimum Load Impedance 1 Ohms Temperature Range 0 50 C operating 15 to 70 C storage Setpoint Relays 2 N O SPST relays rating 40 VDC 100mA Degas E beam at 4 Watts for fifteen minutes Size 33 4 H from flange face x 31 2 W x 31 2 D I O Connection 15 pin D subminiatur...

Page 16: ...andard Mini BA and RS 232 Option Standard Mini BA RS 232 Option 1 Degas ON OFF control 1 Degas ON OFF control 2 Degas Status output 2 Degas Status output 3 Emission Status output 3 Emission Status output 4 Setpoint 1 contact 4 Setpoint 1 contact 5 Setpoint 2 contact 5 Setpoint 2 contact 6 24V Power 6 24V Power 7 Power and Status Ground 7 Power and Status Ground 8 reserved 8 RS 232 Tx 9 Pressure Si...

Page 17: ...22 Option RS 485 Option 1 Degas ON OFF control 1 Degas ON OFF control 2 Degas Status output 2 Degas Status output 3 Emission Status output 3 Emission Status output 4 Setpoint 1 contact 4 Setpoint 1 contact 5 Setpoint 2 contact 5 Setpoint 2 contact 6 24V Power 6 24V Power 7 Power and Status Ground 7 Power and Status Ground 8 RS 422 Tx 8 RS 485 T 9 RS 422 Rx 9 Pressure Signal Output 10 RS 422 Rx 10 ...

Page 18: ...oximately 1 inch 25 mm of free air space around the ventilation openings and that air flow is not blocked Mini BA Tube Replacement Procedure 1 Loosen 5x 4 PHMS from front and rear of case Figure 1 Figure 1 Loosening 5x 4 PHMS from Front and Rear of Case 2 Remove top half of case assembly and place next to bottom case half assembly as shown in Figure 2 Top Case Half Loosen 5x screws at slots do not...

Page 19: ... socket head cap screws and lockwashers as shown in Figure 3 and save for re use Figure 3 Removal of Socket Head Cap Screws and Lockwashers Bottom Case Half Assembly Top Case Half Assembly Gauge Tube Assembly Insular Disk Plain Washer this hole only 3x tube and save remove from Small PCB Bottom Case Half ...

Page 20: ...r alignment of tube pins receptacles while re inserting tube and make sure tube pins are fully engaged in small PCB receptacles 6 Re install 3x allen socket head cap screws and lockwashers as shown in Figure 4 Align and tighten tube assembly to bottom case half 7 Fold over top case assembly onto bottom case and tighten 5x screws Dimensional Diagram Figure 4 Dimensional Diagram eY Y e e BA S SY Min...

Page 21: ...ocal Control see Serial Communications Option for Remote Control Emission ON OFF Button If the display shows a single flashing LED at the top of the scale emission is off Pressing the Emission ON OFF button turns emission ON and pressure readings commence after a five second delay for stabilization At any time during pressure readings emission may be turned OFF by pressing the Emission ON OFF butt...

Page 22: ...ssion Current 1 0 mA Degas ON OFF Button At operating pressures below 1 3E 2 Pa 1 3 E 5 mbar 1E 05 Torr Degas may be activated to degas electrodes Above this pressure the system will not respond to the Degas button To activate Degas press the Degas button until the pressure LED flashes Degas lasts for fifteen minutes expect a slight rise in pressure during initial stages of degassing Once Degas is...

Page 23: ...Setpoint 1 level Setpoint 2 covers from 5E 2 to 5E 7 Pa 5E 4 to 5E 9 mbar 5E 4T to 5E 9T The Setpoint 2 LED illuminates and Relay 2 closes pins 5 and 15 of J1 when pressure falls below Setpoint 2 level For positive relay operation setpoints clear when pressure rises 20 above the setpoint level rather than immediately above For example the 5x10 8 setpoint triggers when pressure falls below 5x10 8 a...

Page 24: ...is action with the Emission control line clears the errors see error conditions The Emission Control Pulse input is functionally equivalent to the Emission push button Like the button it is intended to be momentary and is activated by grounding for a duration of at least 100ms but not to exceed several seconds See the corresponding button description in Front Panel Controls on page 7 for operation...

Page 25: ...PU board has failed to receive communication from daughter board five consecutive times If emission is ON it will be shut off Only resumption of inter board communication will clear this error E09 Overpressure Gauge has detected pressure higher than 1 0x10 2 and has shut down emission NOTE Venting high vacuum to atmosphere must last more than five seconds for this error to take effect Checksum A r...

Page 26: ...ting range of the Eyesys Mini BA Figure 5 Output Voltage as a Function of Pressure Table 7 Voltage Outputs Voltages greater than But less than Indicate pressures in this range 1 2 1 33x10 7 Pa 1x10 9 Torr 1 33x10 9 mbar 2 3 1 33x10 6 Pa 1x10 8 Torr 1 33x10 8 mbar 3 4 1 33x10 5 Pa 1x10 7 Torr 1 33x10 7 mbar 4 5 1 33x10 4 Pa 1x10 6 Torr 1 33x10 6 mbar 5 6 1 33x10 3 Pa 1x10 5 Torr 1 33x10 5 mbar 6 7 ...

Page 27: ...surements reported in literature This table was compiled and published by Robert L Summers of Lewis Research Center NASA Technical Note TND 5285 National Aeronautics and Space Administration Washington DC June 1969 To automatically convert readings of the Mini BA gauge enter the relative gas correction constant via the appropriate Serial Communication command see Serial Communication option The cu...

Page 28: ...Eyesys Mini B A Gauge Controller 14 Table 8 Gas Correction Factors ...

Page 29: ...Eyesys Mini B A Gauge Controller 15 Table 7 Gas Correction Factors continued ...

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Page 31: ...ft Terminal Hyperterminal or equivalent before connecting to an untested command device Switching from Local to Remote When remote commands put Eyesys in remote control the local controls and setpoint switches are inoperative Each setpoint remains at the last local switch setting until changed by a remote setpoint command Switching from Remote to Local Upon selecting Local Control the setpoints ar...

Page 32: ...ll lower case characters are place holders and must be replaced as follows Gas Correction to 1 000 Sensitivity to 15 0 The command format is Gauge address command data carriage return The response is optional data carriage return aa two character listener address 00 for RS232 x 1 9 data value cr message terminator character carriage return Table A 1 Command Set Command Response Read AG Type aa01 c...

Page 33: ...xx 01 for ON Set Degas OFF Mini B A only aa40I1 cr cr Set Degas ON Mini B A only aa41I1 cr cr Read Degas Status Mini B A only aa42I1 cr xx cr where xx 00 for OFF xx 01 for ON Read Emission Current aa52I1 cr x xx cr where x x 0 10 for Low x x 1 00 for High Set Emission Current aa53I1x xx cr where x xx 0 10 is Low 1 00 is High cr Read Gas Correction aa50I1 cr x xxx cr Set Gas Correction aa51I1x xxx ...

Page 34: ...Reading Valid Status aa CØ cr 01 if DATA VALID 00 if DATA INVALID indicates clearing of factory calibration Table A 2 Eyesys Error Messages FF Command does not follow one of the above formats the command or data is invalid or the command length is incorrect There will be no response to a wrong address parity error or lack of termination character Local A Set i e Set Setpoint Pressure Level or Set ...

Page 35: ...RS422 Cabling Figure A 3 RS485 Cabling Command Terminal 9 pin Rx 2 Tx 3 Gnd 5 8 Tx 14 Rx 7 Gnd 6 24v eYeSYS Power Supply Gnd 24V Command Terminal R R T T Gnd 8 T eYeSYS Power Supply Gnd 24V 14 T 9 R 10 R 7 Gnd 6 24V Command Terminal RS485 T T eYeSYS Power Supply 8 Tx 14 Rx 7 Gnd 6 24v Gnd 24V ...

Page 36: ...ion Each RS485 listener must have a separate address To select the Eyesys address select 0 through 7 on the rotary switch marked Address Any commands sent to Eyesys must be prefixed with the corresponding address 00 through 07 See aa of the Command Set ...

Page 37: ...the safe handling of the product and is liable for any harm or injury to Varian employees occurring as a result of exposure to toxic or hazardous materials present in the product CUSTOMER INFORMATION Company name Contact person Name Tel Fax E mail Ship Method Shipping Collect P O Europe only VAT Reg Number USA only Taxable Non taxable Customer Ship To Customer Bill To PRODUCT IDENTIFICATION Produc...

Page 38: ... COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure Describe failure Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high background Gauge tube not working Display problem Vacuum system unstable Cannot...

Page 39: ...Returned Materials Report ...

Page 40: ......

Page 41: ......

Page 42: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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