Agilent Technologies 4UHV User Manual Download

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Contents

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Agilent 4UHV Ion Pump Controller User Manual

87-900-137-01 (A)

Utilisation 37

Entretien 42

Instructions for Use 43

General Information 44

Storage

Prior to Installation 46

Installation 47

Usage

Maintenance 54

Technical Information 55

4UHV Controller Description 57

This Manual: http://www.manuallib.com/file/2630540

Summary of Contents for 4UHV

Page 1: ... ManualLib com ManualLib com collects and classifies the global product instrunction manuals to help users access anytime and anywhere helping users make better use of products Home http www manuallib com Chinese http www shuomingshuku com This Manual http www manuallib com file 2630540 ...

Page 2: ... 9020 929 9021 929 9022 929 9101 929 9200 929 9201 929 9210 929 9211 929 9212 929 9213 929 9400 929 9401 929 9402 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 137 01 A 03 2011 This Manual http www manuallib com file 2630540 ...

Page 3: ...under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer softwa...

Page 4: ...4UHV Ion Pump Controller Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 A 3 104 4UHV Ion Pump Controller This Manual http www manuallib com file 2630540 ...

Page 5: ...4UHV Ion Pump Controller 4 104 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 A This Manual http www manuallib com file 2630540 ...

Page 6: ...to 9 Preparazione per l installazione 10 Installazione 11 Uso13 Manutenzione 18 2 Gebrauchsanleitung19 Allgemeines20 Lagerung 21 Vor der Installation 22 Installation 23 Gebrauch 25 Wartung 30 3 Mode d emploi 31 Indications Generales 32 Emmagasinage 33 Preparation pour l Installation 34 Installation 35 This Manual http www manuallib com file 2630540 ...

Page 7: ...ons for Use 43 General Information 44 Storage 45 Prior to Installation 46 Installation 47 Usage 49 Maintenance 54 5 Technical Information 55 4UHV Controller Description 57 Specifications 59 Operating Mode 65 Start Up 67 Serial 73 Display and Menus 91 Orderable Parts 98 This Manual http www manuallib com file 2630540 ...

Page 8: ...rmazioni Generali8 Immagazzinamento 9 Preparazione per l installazione 10 Installazione 11 Uso 13 Accensione del controller dal pannello frontale modalità LOCAL 15 Manutenzione 18 Smaltimento 18 Traduzione delle istruzioni originali This Manual http www manuallib com file 2630540 ...

Page 9: ...n autorizzati o alla mancata osservanza delle specifiche normative nazionali Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Nel appendice Technical Information vengono fornite delle informazioni dettagliate Questo manuale utilizza le seguenti convenzioni ATTENZIONE I messaggi di attenzione sono ...

Page 10: ...ller User Manual 87 900 137 01 A 9 104 Immagazzinamento Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali Temperatura da 20 C a 70 C Umidità relativa da 0 a 95 senza condensa This Manual http www manuallib com file 2630540 ...

Page 11: ...ntassero segni di danni che potrebbero essere stati causati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti Il materiale dell imballo è completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Figura 1 Imballo del controller Thi...

Page 12: ... per essere sicuri che l energia residua sia stata dissipata ATTENZIONE Il controller può essere utilizzato sia come unità da tavolo che come modulo installato in un rack In ogni caso deve essere posizionato in modo tale che l aria possa circolare liberamente attraverso i fori di areazione presenti sulla copertura Nel caso in cui il controller viene utilizzato come modulo rack DEVE essere installa...

Page 13: ...isolamento del dispositivo connesso al controller 4UHV abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 NOTA Nel caso in cui il controller viene installato in un rack rimuovere i quattro piedini in modo che venga posizionato con almeno 30 mm di spazio sotto e sopra ATTENZIONE In casi rari di guasto il controller potrebbe emettere fumo Se i...

Page 14: ... UTILIZZO nell appendice Technical Information Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e fare riferimento al manuale della pompa collegata AVVERTENZA Accendere i canali di alta tensione solo se connessi alle pompe ioniche tramite gli appositi cavi di alta tensione dotati del cavo di interlock L uso del controller è inteso con cavo di alta tensione provvisto di i...

Page 15: ...er montare correttamente il cavo di interlock fornito nel sacchetto accessori qualora si voglia rinunciare al cavo di alta tensione dotato di interlock Figura 3 NOTA L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento è interrotto l alta tensione viene disabilitata L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento è interrotto l alta tensione vie...

Page 16: ...lità LOCAL NOTA Per accendere l alta tensione HV occorre che l interlock del cavo HV cable interlock sia chiuso connettore inserito Procedere come segue per alimentare il controller e abilitare la tensione sui connettori di alta tensione H V Spegnere il controller Collegare il cavo HV e l interlock del cavo H V nei relativi connettori sul pannello posteriore Selezionare la modalità LOCAL premendo ...

Page 17: ...ller Per spegnere i canali HV Tenere premuto il pulsante HV ON OFF 2 mentre si preme il pulsante HV x 3 4 5 6 dove x è il numero del canale che si vuole accendere o spegnere Per ulteriori dettagli sull uso del controller e sulla descrizione delle informazioni del display fare riferimento alla sezione Technical Information 2 1 3 4 5 6 This Manual http www manuallib com file 2630540 ...

Page 18: ...37 01 A 17 104 AVVERTENZA In condizioni di emergenza per spegnere l unità e tutti i canali alta tensione disattivare l interruttore generale 1 posto sul pannello anteriore Mettendo in off l interruttore generale si spegnerà l unita HV This Manual http www manuallib com file 2630540 ...

Page 19: ...l rispetto delle normative nazionali specifiche Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato è applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunità Europea indica che il prodotto sul quale è applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere...

Page 20: ...leitung Allgemeines 20 Lagerung 21 Vor der Installation 22 Installation 23 Gebrauch 25 Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus 28 Wartung 30 Entsorgung 30 Übersetzung der Originalanleitungen This Manual http www manuallib com file 2630540 ...

Page 21: ...chnitten sind alle erforderlichen Informationen für die Sicherheit des Bedieners bei der Anwendung des Geräts aufgeführt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermaßen hervorgehoben VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam dass bei Nicht...

Page 22: ...r User Manual 87 900 137 01 A 21 104 Lagerung Bei Transport und Lagerung der Controller müssen folgende Umgebungsbedingungen eingehalten werden Temperatur 20 C bis 70 C Rel Luftfeuchtigkeit 0 95 nicht kondensierend This Manual http www manuallib com file 2630540 ...

Page 23: ...speziellen Schutzverpackung geliefert Eventuelle Transportschäden müssen sofort der zuständigen örtlichen Verkaufsstelle gemeldet werden Das Verpackungsmaterial muss korrekt entsorgt werden Es ist vollständig recyclebar und entspricht der EG Richtlinie 85 399 für Umweltschutz Abbildung 1 Verpackung des Controllers This Manual http www manuallib com file 2630540 ...

Page 24: ...dass der restliche Strom dissipiert ist VORSICHT Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden Fällen muß eine ungehinderte Zirkulation der Kühlluft durch die im Gehäuse vorne und unten eingelassen Luftöffnungen gewährleistet sein Wenn der Controller in einem Gestell montiert wird MUSS er in einer vier Rackeinheiten hohen Adapter Einheit installiert werden um zu ve...

Page 25: ... Controller 4UHV angeschlossen ist auch bei Einzelstörungen wie sie von der Vorschrift EN 61010 1 vorgesehen sind angemessen isoliert ist HINWEIS Wenn der Controller in einem Gestell installiert werden soll müssen alle vier Füße abmontiert und über und unterhalb wenigstens 30 mm 1 2 Zoll Platz gelassen werden VORSICHT In seltenen Fällen könnte der Controller bei Störungen Rauch ausstoßen Wenn der ...

Page 26: ...r Benutzung des Controllers müssen sämtliche elektrischen Anschlüsse ausgeführt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden WARNUNG Schalten Sie die Hochspannungsleitungen erst ein wenn diese mit Hilfe der dafür bestimmten Hochspannungskabel des Interlock Kabels an die Ionenpumpen angeschlossen sind Der Gebrauch des Controllers muss unter Verwendung eines Hochspannungskab...

Page 27: ...lock Kabel richtig zu montieren wenn auf das Hochspannungskabel mit Interlock verzichtet werden soll Abbildung 3 HINWEIS Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktivie...

Page 28: ...se sind die richtigen Anschlüsse der Erdungen des HV Kabels des Controller an die Pumpe und des Interlock Kabels ersichtlich VORSICHT Beim Montieren des im Zubehörbeutel mitgelieferten Interlock Kabels gehen Sie sehr vorsichtig vor damit dabei kein Teil in den Controller fällt This Manual http www manuallib com file 2630540 ...

Page 29: ...ng an den Hochspannungsverbindern H V freizugeben Schalten Sie den Controller aus Schließen Sie das HV Kabel und den Interlock des H V Kabels an die jeweiligen Verbinder am Rückenteil Wählen Sie die Modalität LOCAL indem Sie kurz die Taste MODE drücken bis auf dem Display die Aufschrift LOCAL erscheint Halten Sie die Taste HV ON OFF 2 gedrückt und drücken Sie gleichzeitig die Taste HV x 3 4 5 6 wo...

Page 30: ... die Nummer der Leitung ist die ein oder ausgeschaltet werden soll Weitere Einzelheiten zum Gebrauch des Controllers und zur Beschreibung der Display Angaben entnehmen Sie bitte dem Abschnitt Technical Information WARNUNG Bei Not Aus schalten Sie den Hauptschalter 1 auf dem vorderen Bedienfeld aus um das Gerät und sämtliche Hochspannungsleitungen auszuschalten Wenn Sie den Hauptschalter auf Off st...

Page 31: ...ß unter Einhaltung der einschlägigen landesüblichen Vorschriften erfolgen Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Übereinstimmung mit der EURichtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU Ländern gültig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmüll entsorgt werden darf sondern einem s...

Page 32: ...ons Generales 32 Emmagasinage 33 Preparation pour l Installation 34 Installation 35 Utilisation 37 Allumage du Contrôleur du Panneau Frontal Modalité LOCAL 40 Entretien 42 Mise au Rebut 42 Traduction de la mode d emploi originale This Manual http www manuallib com file 2630540 ...

Page 33: ...re aux réglementations nationales spécifiques Les paragraphes suivants donnent toutes les indications nécessaires à garantir la sécurité de l opérateur pendant l utilisation de l appareillage Des renseignements plus détaillés se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants ATTENTION Les messages d attention apparaissent avant certaines pro...

Page 34: ...ser Manual 87 900 137 01 A 33 104 Emmagasinage Pour transporter et emmagasiner le contrôleur il faut observer les conditions suivantes d environnement température de 20 C à 70 C humidité relative 0 95 non condensante This Manual http www manuallib com file 2630540 ...

Page 35: ...ant s être produits pendant le transport contacter tout de suite le bureau de vente local Pendant l opération d ouverture de l emballage veiller tout particulièrement à ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc Le matériel est entièrement recyclable et il est conforme aux directives CEE 85 399 en matière de protection de l environnement Figure 1 Emballage du contrôleur...

Page 36: ...nt quelques instants Attendre environ 1 minute pour être sûr que l énergie résiduelle s est dissipée ATTENTION Le contrôleur peut être utilisé soit comme unité de table que comme module installé dans une armoire De toute façon il doit être placé de manière à ce que l air puisse circuler librement à travers les trous d aération présents dans la couverture Lorsque le contrôleur est utilisé comme mod...

Page 37: ...solation du dispositif branché au contrôleur 4UHV soit adapté même en cas de pannes individuelles et ce tel que prévu par la norme EN 61010 1 NOTE Si le contrôleur est installé dans une armoire enlever les quatre pieds de manière à ce qu il soit placé avec au moins 30 mm d espace en haut et en bas ATTENTION Dans quelques rares cas de panne il est possible que le contrôleur dégage de la fumée Si l ...

Page 38: ...nformation Avant d utiliser le contrôleur effectuer toutes les connexions électriques et se reporter à la notice de la pompe connectée AVERTISSEMENT N allumer les canaux haute tension que s ils ont été branchés aux pompes ioniques par l intermédiaire des câbles haute tension prévus à cet effet et dotés de câble Interlock L usage du contrôleur est subordonné à l usage d un câble haute tension doté ...

Page 39: ...ci dessous pour monter correctement le câble d interlock contenu dans le sachet d accessoires en cas de non utilisation du câble de haute tension équipé d un interlock Figure 3 NOTE L interlock du câble est serré sur la masse de la pompe Si le branchement est coupé la haute tension est interrompue L interlock du câble est serré sur la masse de la pompe Si le branchement est coupé la haute tension ...

Page 40: ... HV entre le contrôleur et la pompe ainsi que du câble d interlock sont reportés sur la figure Connexions des masses ATTENTION En cas d utilisation du câble d interlock contenu dans le sachet d accessoires il faut veiller en particulier à ce qu aucune pièce ne tombe à l intérieur du contrôleur This Manual http www manuallib com file 2630540 ...

Page 41: ...es connecteurs de haute tension H V Eteindre le contrôleur Brancher le câble HV et l interlock du câble H V sur les connecteurs correspondants situés sur le panneau arrière Appuyer brièvement sur la touche MODE pour sélectionner la modalité LOCAL jusqu à ce que l inscription LOCAL s affiche sur l écran Maintenir le bouton HV ON OFF 2 enfoncé tout en appuyant sur le bouton HV x 3 4 5 6 x correspond...

Page 42: ... numéro du canal à allumer ou à éteindre Pour plus de renseignements sur l usage du contrôleur et sur la description des informations de l écran consulter la section Technical Information AVERTISSEMENT En cas de situation d urgence nécessitant un arrêt immédiat de l unité et de tous les canaux haute tension désactiver l interrupteur général 1 situé sur le panneau avant En plaçant l interrupteur gé...

Page 43: ...tions nationales en la matière Mise au Rebut Signification du logo WEEE figurant sur les étiquettes Le symbole ci dessous est appliqué conformément à la directive CE nommée WEEE Ce symbole uniquement valide pour les pays de la Communauté européenne indique que le produit sur lequel il est appliqué NE doit PAS être mis au rebut avec les ordures ménagères ou les déchets industriels ordinaires mais p...

Page 44: ...ructions for Use General Information 44 Storage 33 Prior to Installation 46 Installation 47 Usage 49 Powering On the Controller from the Front Panel LOCAL Mode 52 Maintenance 54 Disposal 54 Original Instructions This Manual http www manuallib com file 2630540 ...

Page 45: ...ventions or by negligence in complying with any specific national rule or regulation The following sections provide you with all the information needed to guarantee the operator s safety when using the equipment Detailed information is provided in the appendix entitled Technical Information The following conventions are used in this manual CAUTION Caution messages are provided before procedures th...

Page 46: ...troller User Manual 87 900 137 01 A 45 104 Storage The following environmental conditions must be met when transporting and storing the controller Temperature 20 C to 70 C Relative humidity 0 95 non condensing This Manual http www manuallib com file 2630540 ...

Page 47: ... of damage that could have been caused during transportation contact your local sales office immediately When unpacking the controller be particularly careful to avoid dropping it or knocking it against anything The packaging material is totally recyclable and complies with EEC directives 85 399 for the safeguard of the environment Figure 1 Controller Packaging This Manual http www manuallib com f...

Page 48: ... some time Wait approx 1 minute to be sure that the residual energy has been dissipated CAUTION The controller can be used either as a desktop unit or as a rack module In any case it must be positioned in a way that the air can circulate freely through the ventilation slots on the cover If the controller is used as a rack module it MUST be inserted into a four rack high adapter to prevent it from ...

Page 49: ...on of the device connected to the 4UHV controller provides an adequate insulation even in the case of a single fault condition as stipulated in the EN 61010 1 normative NOTE If the controller is installed in a rack remove its four feet and place it so as to leave at least 30 mm 1 2 inches of free space above and below CAUTION In rare circumstances a controller fault could result in the emission of...

Page 50: ...cal Information appendix Before using the controller perform all electrical connections and refer to the manual of the connected pump WARNING Switch on the high voltage channels only if they are connected to the ionic pumps by means of the special purpose high voltage cables equipped with interlock cable It is assumed that the controller will be used together with the high voltage cable having a s...

Page 51: ...d in the accessories bag in the case in which an HV cable with interlock is not used Figure 3 NOTE The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted To connect the controller to the pump use a HV cable with interlock see parts that can be ord...

Page 52: ...HV Ion Pump Controller User Manual 87 900 137 01 A 51 104 CAUTION When using the interlock cable furnished in the accessories bag make sure that no parts drop accidentally inside the controller This Manual http www manuallib com file 2630540 ...

Page 53: ...controller and apply voltage to the high voltage HV connectors Switch off the controller Connect the HV cable and the interlock of the HV cable in the related connectors on the rear panel Select LOCAL mode briefly pressing the MODE key until LOCAL is shown on the display Hold down the HV ON OFF button 2 while pressing the HV x 3 4 5 6 button where x is the number of the channel to be switched on o...

Page 54: ...number of the channel to be switched on off For further details on using the controller and for a description of the information appearing on the display refer to the section Technical Information WARNING In situations of emergency to switch off the unit and all the high voltage channels turn off the main power switch 1 situated on the front panel When the main switch is turned off the HV unit is ...

Page 55: ...pecific national norms Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentia...

Page 56: ...61 Keys 61 Rear Panel Description 63 Operating Mode 65 Selecting Operating Mode from Front Panel 65 Selecting Operating Mode via Serial66 Start Up 67 Connection of Input remote 72 Serial73 Connector Examples 74 Window Protocol 74 Error Description 84 Error Code 84 Old Serial Protocol Binary Protocol 87 Original Instructions This Manual http www manuallib com file 2630540 ...

Page 57: ...tion 56 104 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 A Display and Menus 91 Displaying Channel Related Information 74 Commands93 Menu 94 Orderable Parts 98 This Manual http www manuallib com file 2630540 ...

Page 58: ...for displaying the operating values voltage current pressure Remote I O card with DB37 connector RS232 and RS485 serial communications Figure 6 4 UHV Controllers The controller contains one or two high voltage modules Each high voltage module can have one 200 W channel or one 120 W channel or two 80 W channels Some examples of how HV channels can be configured are given below for details see the O...

Page 59: ...tion 58 104 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 A One 200 W channel and two 80W channels One 120 W channel The 4UHV controller can be operated in the modes LOCAL SERIAL or REMOTE This Manual http www manuallib com file 2630540 ...

Page 60: ...00 W or 80 W each channel Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Fuse 5x20 T6 3A 250V Voltage measurement Resolution 100 V Accuracy 5 Current measurement Measurement range 10 nA to 100 mA logarithmic scale Resolution 2 digit of the mantissa maximum 10 nA Accuracy 6 Weight 6 5 kg Compliance with EN 61010 1 2001 Safety requirements for electrical equipment for measurement...

Page 61: ...ntroller Outline The outline dimensions for the 4UHV controller are shown in the following figures Front View Rear View Figure 8 Controller Model Dimensions 0 1000 2000 3000 4000 5000 6000 7000 8000 0 20 40 60 80 100 120 Current mA Voltage V Output curve 200W Output curve 80W 211 40 141 20 177 00 164 30 This Manual http www manuallib com file 2630540 ...

Page 62: ... pressed while you press the HV x key where x is the number of the channel for which you want to change the output voltage The output voltage will change cyclically between STEP 7kV 5kV 3kV Protect To activate or disactivate Protect mode keep the Protect key pressed while you press the HV x key where x is the number of channel for which you want to activate or disactivate the Protect functionality...

Page 63: ... the channel The meaning of the 4 indicators is the following 1 HV x Square lit black HV on Square not lit HV off Square flashing Error 2 Protect x Square lit black Protect on Square not lit Protect off Square flashing Protect error 3 SP x Square lit black Set point activate Square not lit Set point not active 4 Step x Square lit black Step Square not lit Fixed This Manual http www manuallib com f...

Page 64: ...llowing are present on the rear panel The HV connectors 1 2 3 or 4 according to model The interlock connectors associated to each channel The fuses The DB9 connector for RS232 and RS485 serial communication The DB37 connector for Remote I O signals Fuses Interlock connector HV Connectors Serial Port Remote I O This Manual http www manuallib com file 2630540 ...

Page 65: ...The following figure shows the location of this assembly Figure 11 Rear Panel Proceed as follows to replace one or both fuses 1 Disconnect the mains cable 2 Waiting for 15 second 3 Remove the fuse with a small screwdriver 4 Replace the fuse 5 Use only 5x20 T6 3A 250V fuses This Manual http www manuallib com file 2630540 ...

Page 66: ...upplied can be read via the Front Panel Serial and Remote Change from one mode to the next can be done either via the Front Panel or a serial command NOTE Change from one mode to another can be done with the high voltage switched on However the channels switch off if Remote mode is selected but no commands for switching on are present on the remote connector Selecting Operating Mode from Front Pan...

Page 67: ...ual 87 900 137 01 A Selecting Operating Mode via Serial Using serial communications via the protocol WIN protocol see chapter SERIAL Window Protocol write the chosen value in window 8 Table 3 Keys Value Description 0 Serial 1 Remote 2 Local This Manual http www manuallib com file 2630540 ...

Page 68: ...d on the front panel to OFF 2 Insert the power cable into the correct connector on the rear panel 3 Connect the HV cables to the controller and to the ion pumps 4 Make sure that Interlock of HV cable is connected 5 To switch on the unit put the main power switch to ON 6 Select Local for the Operating mode 7 Press the keys HV ON OFF keys and HV x where x is the number of the channel you want to swi...

Page 69: ...NC Fault Relay Pin 13 NO Fault Relay Pin 31 Common Fault Relay Channel 1 Input Pin 6 CH1 on off Pin 7 CH1 protect Pin 8 CH1 step Pin 22 Digital Gnd Analog Output Pin 1 Analog 1 Pin 3 Analog Gnd Digital Output Pin 17 CH1 NC Set point Relay Pin 18 CH1 Common Relay Pin 19 CH1 NO Set point Relay Channel 2 Input Pin 9 CH2 on off Pin 10 CH2 protect Pin 11 CH2 step Pin 22 Digital Gnd Analog Output Pin 2 ...

Page 70: ...25 CH3 step Pin 22 Digital Gnd Analog Output Pin 20 Analog 3 Pin 3 Analog Gnd Digital Output Pin 35 CH3 NC Set point Relay Pin 36 CH3 Common Relay Pin 37 CH3 NO Set point Relay Channel 4 Input Pin 26 CH4 on off Pin 27 CH4 protect Pin 28 CH4 step Pin 22 Digital Gnd Analog Output Pin 21 Analog 4 Pin 3 Analog Gnd Digital Output Pin 32 CH4 NC Set point Relay Pin 33 CH4 Common Relay Pin 34 CH4 NO Set p...

Page 71: ... 01 A Figure 13 Recorder Output Pressure Figure 14 Analog remote vs Pressure kPa Analog remote vs Pressure 0 0 1 0 2 0 3 0 4 0 5 0 1 0E 12 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 Pressure kPa Analog remote Volt 1 3E 6 kPa 1 3E 12 kPa This Manual http www manuallib com file 2630540 ...

Page 72: ... 900 137 01 A 71 104 Figure 15 Analog remote vs Pressure mbar Analog remote vs Pressure 0 0 1 0 2 0 3 0 4 0 5 0 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 Pressure mbar Analog remote Volt 1 3E 5 mbar 1 3E 11 mbar This Manual http www manuallib com file 2630540 ...

Page 73: ... Controller User Manual 87 900 137 01 A 24V A Connection of Input remote In order to activate the inputs remote CH on off Ch protect CH Step connect the pins as following Figure 16 Input Controller Customer device s This Manual http www manuallib com file 2630540 ...

Page 74: ...HV interconnections Figure 17 4UHV interconnections This is a 9 pin D type serial input output connector that allows the 4UHV to be controlled via an RS232 or RS485 connection Table 5 PIN No Signal Name 1 5 V OUT 2 TX RS232 3 RX RS232 4 Reserved 5 GND 6 A RS485 7 Reserved 8 B RS485 9 Reserved This Manual http www manuallib com file 2630540 ...

Page 75: ...nd the RS485 interfaces are available on the 9 pin D type serial input output connector The communications protocol is the same see the structure below but only the RS485 handles the address field Therefore to enable the RS485 you need to select both the type of communication and the device address using the front panel menu or the Navigator software Ion controller 1 Ion controller 2 This Manual h...

Page 76: ...ce as follows 1 The host MASTER sends a MESSAGE CRC to the controller SLAVE 2 The controller answers with an ANSWER CRC to the host 3 The MESSAGE is a string in the following format 4 STX ADDR WIN COM DATA ETX CRC NOTE When data is indicated between two quotes it implies that the data indicated is the corresponding ASCII character Where STX Start of transmission 0x02 ADDR Unit address 0x80 for RS2...

Page 77: ...x30 to read the window 0x31 to write in the window DATA an alphanumeric ASCII string with the data to be written in the window In the case of a read command this field is not present The field length varies according to the data type as shown in the following table This Manual http www manuallib com file 2630540 ...

Page 78: ...d including the ETX terminator The value is hexadecimal coded and represented by two ASCII characters The SLAVE addressed responds with an ANSWER whose structure depends on the MESSAGE type When the MESSAGE is a read command the SLAVE responds transmitting a string with the same structure as the MESSAGE NOTE Using the RS485 interface the message structure is identical to that used for the RS232 in...

Page 79: ...byte 0x33 The data type specified in the command Logic Numeric or Alphanumeric is not in agreement with the Window specified Out of Range The value expressed during a write command is not within the range value for the specified window Win Disabled 1 byte 0x35 The window specified is Read Only or is temporarily disabled Table 8 Windows Description WIN R W Type Description Range 11 R W L HV ON OFF ...

Page 80: ...ep 1000 def 7000 614 R W N I protect CH1 1 100 step 1 mA 615 R W A Set Point CH1 X XE XX 620 R W N Device Number CH1 see below 622 R W N Power max CH2 20 W 80 W 623 R W N V target CH2 3000 7000 V step 1000 def 7000 624 R W N I protect CH2 1 100 step 1 mA 625 R W A Set Point CH2 X XE XX 630 R W N Device Number CH3 see below 632 R W N Power max CH3 20 W 80 W 633 R W N V target CH3 3000 7000 V step 1...

Page 81: ... Set Point see below 808 R N Temperature HV3 0 200 C 809 R N Temperature HV4 0 200 C 810 R N V measured CH1 0 7000 V step 100 V 811 R A I measured CH1 1E 10 9E 1 A 812 R N Pressure CH1 X XE XX 820 R N V measured CH2 0 10000 V step 100 V 821 R A I measured CH2 1E 10 9E 1 A 822 R N Pressure CH2 X XE XX 830 R N V measured CH3 0 10000 V step 100 V 831 R A I measured CH3 1E 10 9E 1 A 832 R N Pressure C...

Page 82: ...3 STX ADDR ACK ETX CRC Turn OFF Channel 1 PC Controller 02 80 30 31 31 31 30 03 42 32 STX ADDR WINDOW WR DATA ETX CRC Controller PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Read Pressure win 812 Channel 1 PC Controller 02 80 38 31 32 30 03 38 38 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 31 32 30 20 20 20 31 2E 35 45 2D 30 38 03 45 32 STX ADDR WINDOW WR DATA ETX CRC Data 1 5E 8 This Manual ht...

Page 83: ...ontroller 02 80 38 31 31 30 03 38 42 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 31 31 30 20 20 20 32 2E 39 45 2D 30 35 03 45 33 STX ADDR WINDOW WR DATA ETX CRC Data 2 9E 5 Operating mode Win 601 Autostart ON PC Controller 02 80 36 30 31 30 30 30 30 30 30 30 30 30 30 31 03 38 34 STX ADDR WINDOW WR DATA ETX CRC Controller PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Autostart OFF PC Controller 0...

Page 84: ...0 30 30 31 30 30 03 38 36 STX ADDR WINDOW WR DATA ETX CRC Fixed Step 603 PC Controller 02 80 36 30 33 30 03 38 36 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 36 30 33 30 30 30 30 30 30 30 30 30 30 31 03 38 37 STX ADDR WINDOW WR DATA ETX CRC Status Set Point 804 PC Controller 02 80 38 30 34 30 03 38 46 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 30 34 30 30 30 30 30 30 30 30 30 30 31 03 38...

Page 85: ... in window 206 Table 9 WIN 505 value Channel 0 All channels 1 Channel 1 2 Channel 2 3 Channel 3 4 Channel 4 Error Code The error code is displayed in decimal format Binary representation of this number provides indications regarding the type of error that has occurred The error table is shown below Table 10 Error code in decimal format Binary Description 0 0000000000000 No error 1 0000000000001 FA...

Page 86: ...xample Interlock cable Error code 32 decimal 0000000010000 binary Interlock cable error Interlock cable Overtemp HV Error code 96 decimal 0000000110000 binary Interlock cable error Overtemp HV Error code Win 206 Error interlock 02 80 32 30 36 30 03 38 37 STX ADDR WINDOW RD ETX CRC 02 80 32 30 36 30 30 30 30 30 33 32 03 38 36 STX ADDR WINDOW WR DATA ETX CRC Channel selection Win 505 Read 02 80 35 3...

Page 87: ...W RD ETX CRC 02 80 32 30 36 30 30 30 30 30 33 32 03 38 36 STX ADDR WINDOW WR DATA ETX CRC Channel selection Win 505 Write 2 02 80 35 30 35 31 30 30 30 30 30 32 03 38 30 STX ADDR WINDOW WR DATA ETX CRC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Error code Win 206 Interlock not present error because channel 2 has been selected 02 80 32 30 36 30 03 38 37 STX ADDR WINDOW RD ETX CRC 02 80 32 30 36 30 30 30...

Page 88: ...ollowing formats Table 11 Type No of Bytes Description Read 1 3Fh3 performs reads on the Splitter Box Status 1 0 30h false off 1 31h true on 5 Integer 5 xxxxx represented in BCD4 with 5 digits always positive BitField 8 Like integer type but meanings are associated with the single bits of the number Exponential 7 x xEsxx where x is BCD digits E is the 45h character and s is the or sign String n Se...

Page 89: ...of Bytes Value Description Header command 1 81h 81h A0h Header for the RS232 and RS422 serial Header and address for the RS485 129 160 serial Header response 01h 01h 20h Header for the serial RS232 RS422 Header and address for the RS485 serial Length 2 Data packet length in BCD command channel data fields only Command See description of commands byte 0 command byte 1 subcommand Channel 1 30h 31h 3...

Page 90: ...h 30h 5 Measurement unit D0 44h 30h 7 Protect C0 43h 30h 8 Fixed Step B0 42h 30h 9 Power supply polarity G0 47h 30h 10 Max power J0 4Ah 30h 11 Vmax H0 48h 30h 12 Iprotect K0 4Bh 30h 13 Set point P0 50h 30h 14 V meas S0 53h 30h 15 I meas T0 54h 30h 16 P meas U0 55h 30h 17 Set point status g0 67h 30h 18 Interlock status 0 5Dh 30h 19 Error status z0 7Ah 30h This Manual http www manuallib com file 263...

Page 91: ...ble Interlock 02h Reserved 04h Reserved 08h HV1 Cable Interlock 10h HV4 Cable Interlock 20h Reserved 40h Reserved 80h HV2 Cable Interlock Value Error Status Coding active if 1 33h Cable Interlock 36h Excess temperature 37h Power input error 38h FAN Error 39h Protect 31h 30h Short circuit 31h 31h HV out error 31h 32h Zero Measurement This Manual http www manuallib com file 2630540 ...

Page 92: ...X X X l X X 4 0 S 5 5 2 t a r C X X X 5 5 4 0 D i o 1 7 d 7 X X l e e Figure 21 Displaying Channel Related Information The display can be configured easily to display different information depending on the needs of the customer Information on All Channels The voltage on all the four channels can be displayed simultaneously or the current of all four channels or the pressure To do this press the V ...

Page 93: ... 7 Display the pressure for each channel 8 Press V I P 0 7 0 0 e 4 e V V S t F i S t 2 7 0 0 0 1 7 0 0 0 3 7 0 0 0 S V x t V e p p p 9 Display the voltage and operation mode Step Mode Fixed mode for each channel 10 Press V I P A X E X A X X 3 1 E X X X X X X A 2 X E X A 4 X X E X X 11 Display the current for each channel 12 Press V I P 1 Y X X Y Y Y Y Y X X X m b X X m 3 4 X X X E X Y X Y X X E 2 ...

Page 94: ... channel 3 are being displayed Commands You can give the controller three types of commands Switch on off channels Activate disactivate Protect mode Change output voltage Switching Channels On Off To switch a high voltage channel on or off keep the HV ON OFF key pressed while you press the HV x key where x is the number of the channel you want to switch on or switch off Activating Disactivating Pr...

Page 95: ...gure some parameters of the controller These configurable parameters can be divided into two groups Controller general parameters Specific parameters for each channel The general parameters of the controller are the following Pressure measurement unit mbar torr pascal Serial baud rate 1200 4800 9600 Serial Type RS232 RS485 RS485 Address from 0 to 31 Auto start Yes No Fan Always on switches on if t...

Page 96: ... go back press Esc at any time In multiple choice menus the symbol appears next to the value currently in use and the value currently used will flash To change the value in each menu press the key or This causes the symbol to move but the old value continues to flash To save the new value you must press Enter As you press Enter the new value is saved and starts to flash If it is not possible for a...

Page 97: ...O L N F I G U R E G E N E R C A H V 1 H V 2 R N F I C O E N E G e s s m B a r u r e T o r r A L P r G C O S e N F I G E G N E R L r i a l B a u d R a 1 2 0 0 4 8 0 0 A t e L e y p E R A 5 R S 4 8 2 R S 2 3 T S e r i a l E N N F I G G C O l a C O N G E S e r A d F d E R N r L X X A I G i O N S Y E t s t a r L A u t o N E R A G E C O N I G F C O N F I G G E N E R A L F a n T A L W A Y S O N H R E S ...

Page 98: ...O I N T A E T P B O I N T A L G E N E R A L S E T P O I N T S e t P o i n t H x A C X X E X X A A B L O G A N A A L O G A N A u t o g O n a l N E R A L G E O N F I G C n a O l o T E A L G E R N E A M O R E g u t A C H x C O G U R N F E I H V 1 H V 3 H V 2 H V P u X X X X X m X X X X X p 1 H V 1 I P r o t X X m e A c t H V 1 P o X X e r M a x W X w This Manual http www manuallib com file 2630540 ...

Page 99: ... Negative 929 9401 4UHV with 4 channels 80W Positive 929 9210 4UHV with 2 channels 80W Negative 1 channel 200W Negative 929 9211 4UHV with 2 channels 80W Positive 1 channel 200W Positive 929 9022 4UHV with 1 channel 200W Positive 1 channel 200W Negative 929 9402 4UHV with 2 channels 80W Positive 2 channels 80W Negative 929 9212 4UHV with 2 channels 80W Positive 1 channel 200W Negative 929 9213 4UH...

Page 100: ...This Manual http www manuallib com file 2630540 ...

Page 101: ...This Manual http www manuallib com file 2630540 ...

Page 102: ...This Manual http www manuallib com file 2630540 ...

Page 103: ...This Manual http www manuallib com file 2630540 ...

Page 104: ...This Manual http www manuallib com file 2630540 ...

Page 105: ...strial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea ...

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