MPS75SV Hardware Manual
Overview
1.2. Basic Specifications
Table 1-3:
MPS75SV Series Mechanical Specifications
Mechanical Specifications
(1)
MPS75SV-5
Travel
5 mm
Accuracy
1.0 mm/rev Ball Screw
Standard
±2.0 µm
Calibrated
(2)
±1.0 µm
0.5 mm/rev Lead Screw
Standard
N/A
Calibrated
N/A
Resolution (minimum incremental motion)
0.05 µm
Bidirectional
Repeatability
(2)
1.0 mm/rev Ball Screw
±0.75 µm
0.5 mm/rev Lead Screw
N/A
Straightness
±3.0 µm
Wedge Ratio
8.34:1
Maximum Speed
1.0 mm/rev Ball Screw
DC Motor (-M1)
5.5 mm/s
Stepper Motor (-M2)
3.0 mm/s
0.5 mm/rev Lead Screw
DC Motor (-M1)
N/A
Stepper Motor (-M2)
N/A
Load Capacity
(3)
12 kg
Stage Mass
2.8 kg
Material
Stainless-Steel Carriage;
Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. With Aerotech controllers.
3. Payload specifications are for a single-axis system.
www.aerotech.com
Chapter 1
13
