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ECO165LM Hardware Manual
Table of Contents
List of Tables
Model Numbers and Ordering Options
ECO165LM Series Specifications (-0100 to -0250)
ECO165LM Series Specifications (-0300 to -0600)
Stage Mounting Surface Flatness Requirement
Stage to Mounting Surface Hardware
Linear Motor Limit and Encoder Connector Wiring (-E1 and -E2 Incremental Encoder
General Motor Connector Wiring (for Z or T Axes)
General Feedback Connector Wiring (for Z or T axes)
ECO165LM Linear Motor Specifications (BLMC-142-A)
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