ECO165LM Hardware Manual
Overview
Table 1-4:
ECO165LM Series Specifications (-0300 to -0600)
-0300
-0400
-0500
-0600
Travel
300 mm
400 mm
500 mm
600 mm
Accuracy
(1)
Standard
±14 μm
±16 μm
±18 μm
±20 μm
Calibrated
±2 μm
±2.5 μm
±2.5 μm
±3 μm
Resolution (Minimum Incremental Motion)
10 nm
Bidirectional Repeatability
(1)
±0.75 μm
±1.0 μm
±1.0 μm
±1.0 μm
Horizontal Straightness
(1)
±7 μm
±9 μm
±11 μm
±13 μm
Vertical Straightness
(1)
±7 μm
±9 μm
±11 μm
±13 μm
Pitch
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Roll
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Yaw
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
1.5 g
Maximum Force,
Continuous
M1
36.5 N
M2
77.7 N
Load Capacity
(3)
Horizontal
45 kg
Side
45 kg
Moving Mass
2.1 kg
Stage Mass
M1
9.0 kg
10.3 kg
11.6 kg
12.8 kg
M2
10.4 kg
12.0 kg
13.6 kg
15.2 kg
Material
Anodized Aluminum
Mean Time Between Failure
20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
www.aerotech.com
Chapter 1
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