Aerotech ANT95LZ Series, Hardware Manual

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Table of Contents
ANT95LZ Series Single-Axis Z Direct-Drive Nanopositioning Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 7
Safety Procedures and Warnings 8
Installation and Operation 9
Electrical Warnings 10
Motor-Related Warnings 11
Pinch Points 12
Magnetic Hazards 13
Handling and Storage 14
Chapter 1: Overview 17
1.1. Environmental Specifications 18
1.2. Accuracy and Temperature Effects 18
1.3. Basic Specifications 19
1.4. Air Requirements 20
Chapter 2: Installation 21
2.1. Dimensions 21
2.2. Securing the Stage to the Mounting Surface 23
2.2.1. Setting up the Pneumatic Counterbalance 25
2.3. Attaching the Payload to the Stage 27
Chapter 3: Electrical Installation 31
3.1. Motor and Feedback Connectors 32
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 35
3.4. Limits, Marker, and Machine Direction 37
3.5. Motor and Feedback Phasing 38
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 44
Appendix A: Warranty and Field Service 45
Appendix B: Revision History 47
Index 49
ANT95LZ Hardware Manual Table of Contents
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