Aerotech ANT95LZ Series, Hardware Manual

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List of Tables
Table 1-1: Model Numbers and Ordering Options 17
Table 1-2: Environmental Specifications 18
Table 1-3: ANT95LZ Series Specifications 19
Table 2-1: Stage Mounting Surface Flatness Requirement 23
Table 2-2: Stage to Mounting Surface Hardware 24
Table 2-3: Payload to Stage Surface Hardware 27
Table 3-1: 25-Pin Motor and Feedback Connector Pinout 33
Table 3-2: 25-Pin Mating Connector Part Numbers 33
Table 3-3: Hall-Effect Sensor Specifications 35
Table 3-4: Thermistor Specifications 35
Table 3-5: Encoder Specifications 35
Table 3-6: Limit Switch Specifications 35
Table 3-7: ANT95LZ Motor Specifications 36
Table 3-8: Encoder Resolution 36
ANT95LZ Hardware Manual List of Tables
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