Aerotech ANT95LZ Series, Hardware Manual

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Chapter 1: Overview
The specifications in this manual pertain to the second generation of ANT95LZ stages. The ordering
options (
Table 1-1 ) and basic specifications ( Section 1.3. ) have changed. The visual differences
between second and first generation stages:
l
an updated Aerotech logo
l
a revised shipping clamp design
l
and the introduction of additive (3D-printed) parts.
Refer to Figure 1-1 . Contact Aerotech if you need a first generation manual.
Figure 1-1: GEN2 vs GEN1 Visual Comparison
Table 1-1: Model Numbers and Ordering Options
ANT95LZ Single-Axis Z Direct-Drive Nanopositioning Stage
Travel (Required)
-025 25 mm travel
-050 50 mm travel
Feedback (Required)
-E1 Incremental linear encoders, 1 Vpp amplified sine output
-E2
Incremental linear encoders, digital RS422 output, 5 nm electrical
resolution
-E4
Incremental linear encoders, 1 Vpp amplified sine output, high-
performance
Cable Orientation (Required)
-CBL1 Right-hand cable exit
-CBL2 Lef-hand cable exit
Performance Grade (Required)
-PL1 Base performance
-PL2 High-accuracy performance
Integration (Required)
-TAS
Test as system: Testing, integration, and documentation of a group of
components as a complete system that will be used together.
-TAC
Test as components: Testing and integration of individual items as discrete
components that ship together.
ANT95LZ Hardware Manual Chapter 1: Overview
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