GLOBAL TECHNICAL SUPPORT
Go to the
Global Technical Support Portal
for information and support about your
Aerotech, Inc. products. The website supplies software, product manuals, Help files,
training schedules, and PC-to-PC remote technical support. If necessary, you can
complete Product Return (RMA) forms and get information about repairs and spare
or replacement parts. To get help immediately, contact a service office or your sales
representative. Include your customer order number in your email or have it
available before you call.
This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2015-2022, Aerotech, Inc., All rights reserved.
Summary of Contents for ANT95LZ Series
Page 1: ...Revision 2 01 ANT95LZ Series Single Axis Z Direct Drive Nanopositioning Stage HARDWARE MANUAL...
Page 6: ...This page intentionally left blank List of Tables ANT95LZ Hardware Manual 6 www aerotech com...
Page 22: ...Figure 2 2 ANT95LZ 025 Dimensions 2 1 Dimensions ANT95LZ Hardware Manual 22 www aerotech com...