Aerotech ANT130LZS Series, Hardware Manual

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Table of Contents
ANT130LZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning
Stage
1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 6
Safety Procedures and Warnings 7
Installation and Operation 8
Electrical Warnings 9
Motor-Related Warnings 10
Pinch Points 11
Magnetic Hazards 12
Handling and Storage 13
Chapter 1: Overview 15
1.1. Environmental Specifications 16
1.2. Accuracy and Temperature Effects 16
1.3. Basic Specifications 17
1.4. Air Requirements 18
Chapter 2: Installation 19
2.1. Dimensions 19
2.2. Securing the Stage to the Mounting Surface 21
2.2.1. Setting up the Pneumatic Counterbalance 23
2.3. Attaching the Payload to the Stage 25
Chapter 3: Electrical Installation 29
3.1. Motor and Feedback Connectors 30
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 36
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Counterbalance Maintenance 44
4.4. Troubleshooting 45
Appendix A: Warranty and Field Service 47
Appendix B: Revision History 49
Index 51
ANT130LZS Hardware Manual Table of Contents
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