Advanced Energy VarioMatch Match Network VM 1000 Platform, User Manual

Page: 84 / 194

Advanced Energy ®
5-28
•
"Changing the Interconnector" on page 5-29
•
"Changing the Jumpers" on page 5-32
•
"Reattaching the Top Cover and Reconnecting Power and R F ' on page 5-35
•
Also see "Interaction With a Cesar Generator" on page 5-16 for information on
using a CESAR generator to control the V arioMatch match network
TOOLS REQUIRED TO CHANGE THE INTERCONNECTION
AE supplies the following equipment:
•
Interconnec t or
• Bridge, to hold the water tubing in place once you remove the original
interconnector
You will need to supply the following additional equipment:
• 7 mm wrench
• 12 mm wrench
• 14 mm wrench
DISCONNECTING POWER AND RF, AND REMOVING THE
COVER
To Disconnect Power and RF and to Remove the Cover:
1. Turn off RF from the generator.
2. Disconnect AC MAINS.
3. Disconnect RF in
( RF-GENERATOR ) .
4. Disconnect RF ou t (P L ASMA/L O AD ) .
5. Remove the top cover, being careful to not damage the plug l eading to the fan:
a. Remove the l arge top cover (with the fan) from the V arioMatch match ne t work
by unscrewing the twe l ve screws on the cover. Leave the small top and side
covers in place.
b. Disconnect the pl ug leading from top lid to the fan.
I nsta ll at i on , Setup, and Operat i on 57020080-00D