AE VarioMatch
TM
Match Network, VM 1000/1500 P
l
atform
In configuration A (Gamma topology) the tune (series) capacitor comes first from the
generator's point of view whi
l
e in configuration B (L match topology) the
l
oad (shunt)
capacitor comes first.
Figure 2-4.
Gamma topology
Figure 2-5.
L match topology
-
3430
ZPlasma
-
3431
57020080-00D
Product Overv
i
ew and Theory
2-7
Summary of Contents for VarioMatch Match Network VM 1000 Platform
Page 2: ......
Page 6: ...Advanced Energy vi 57020080 00D...
Page 10: ...Advanced Energy X Table of Contents 57020080 00D...
Page 12: ...Advanced Energy xii List of Tables 57020080 00D...
Page 16: ...Advanced Energy 1 xvi 57020080 00D...
Page 30: ...Advanced Energy 2 8 Product Overview and T heory 57020080 00D...
Page 48: ...Advanced Energy 3 18 Specifications 57020080 00D...
Page 56: ...Advanced Energy 4 8 Communication Interfaces and Controls 57020080 00D...
Page 96: ...Advanced Energy 5 40 Installation Setup and Operation 57020080 00D...
Page 102: ...Advanced Energy 6 6 Troubleshooting and Global Services 57020080 00D...
Page 190: ...Advanced Energy 7 88 VarioMatch Match Network Tuning Ranges 57020080 00D...