4-2
IM AQ6150B-02EN
No. Message
Cause
85
Hardware error (Ref Laser timeout) The internal reference light source (He-Ne laser) failed to start.
86
Calibration data failed!
Calibration data is abnormal.
90
Hardware error(PCI device)
Failed to initialize the PCI device at startup.
91
Hardware error(motor Initialize)
Failed to initialize the internal motor at startup.
No. 100 and higher Message that indicate remote control errors
113 Undefined header
Undefined command. Check the command type.
200 Execution error
Failed to execute the command. Check the setup conditions.
220 Parameter error
Check the parameter because it is incorrect.
222 Data out of range
The parameter range has been exceeded.
Check the ranges of the settings.
223 Too much data
The response data is too large for the command.
Execute a query command that will return response data within the appropriate size.
350 Queue overflow
The amount of data in the queue has reached its upper limit. Query error information
with the :SYST:ERR? command to reduce the amount of error in the error queue.
400 Query error
Unable to respond to the query.
410 Query INTERRUPTED
The response to the query has been overwritten by a response to another query.
440 Query UNTERMINATED
There was no response to the query.
4.1 Messages
