32
WIKA operating instructions Ultra High Purity transducer, model WUD-2x
11611057.05 08/2021 EN/DE
EN
9. Specifications
Specifications
Models WUD-20, WUD-25 and WUD-26
WUD-20 / WUD-25
WUD-26
Measuring range
psi -
30
60
100
160
250
350
500
1.000 1.500
bar -
2
4
7
11
17
25
36
70
100
Overpressure limit
1)
psi 120
120
120
210
320
500
750
1.100 2.100 3.000
Burst pressure
1)
psi 1.800 1.800 1.800 2.200 2.600 4.800 6.200 7.400 8.000 10.500
Measuring range
psi
2.000 3.000 5.000
bar
145
225
360
Overpressure limit
1)
psi
4.200 6.600 10.000
Burst pressure
1)
psi
10.500 10.500 10.500
Measuring principle
Thin-film sensor
Material
Wetted parts
Process connection 316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR)
Pressure sensor
2.4711 / UNSR 30003
Case
Lower body
304 SS
Plastic head
PBT
Keyboard
TPE
Display cap
PC
Inboard helium leak test
< 1 x 10
-9
mbar l/sec (atm STD cc/sec) per SEMI F1
Surface quality
Electropolished, typ. Ra ≤ 0.13 µm (RA 5); max. Ra ≤ 0.18 µm (RA 7) per SEMI F19
Dead volume
WUD-20 < 1.5 cm
3
, WUD-25 < 1 cm
3
, WUD-26 < 1 cm
3
Permissible media
Speciality gases, mist, liquids
1) 1 psi = 0.,069 bar
9. Specifications